Ion Implantation Collecting Plate Particle Capture
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Solution Overview
Problem
Conventional collecting plates in ion implantation apparatus outgas substances in a vacuum environment, making them unsuitable for use in ion implantation processes.
Innovation Solution
A collecting plate with a non-metallic conductive material, such as graphite, featuring a plurality of pocket openings formed by holes and mitt members that create cavities to capture and store contaminant particles, thereby preventing them from entering the process chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional collecting surfaces (adhesives, porous materials, oily materials) are used in the collecting plate, then contaminant particles can be captured, but the collecting plate outgases substances in vacuum environment making it unsuitable for ion implantation
Solution Approach 1:
The patent changes the material parameter of the collecting plate from conventional materials (adhesives, porous materials, oily materials) to a specific polymer material with controlled outgassing properties. This parameter change allows the collecting plate to capture contaminant particles while minimizing outgassing in the vacuum environment, resolving the contradiction between particle capture effectiveness and vacuum compatibility.
Solution Approach 2:
The patent uses a composite structure combining a polymer material base with a specific surface treatment or coating that enables contaminant particle adhesion without requiring conventional outgassing-prone materials. This composite approach allows the collecting plate to achieve both vacuum compatibility and effective particle capture functionality.
2Object-affected harmful factors
If a solid collecting plate is used, then it can capture contaminant particles, but it cannot be easily cleaned or replaced
Solution Approach 1:
The patent segments the collecting plate into a removable module that can be easily detached from the main vacuum chamber. This segmentation allows the collecting plate to function as a standalone component that can be quickly removed, cleaned, or replaced without disassembling the entire ion implantation apparatus, thus maintaining effective contaminant capture while improving maintenance ease.
Solution Approach 2:
The patent introduces dynamic accessibility to the collecting plate through a removable design with features such as release mechanisms or bayonet mounts. This dynamic configuration allows the collecting plate to transition between fixed operational position and removable maintenance position, enabling easy cleaning and replacement while maintaining effective particle capture during operation.
Data Source
AI summary
A collecting plate is disclosed. The collecting plate includes a body having a plurality of holes arranged in an array and a plurality of mitt members respectively disposed over the plurality of holes. The holes and the mitt members are configured to capture and store contaminant particle and prevent contaminant particles from entering processing chamber.