Collection Cup Segmentation for Gas-Liquid Separation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate liquid processing apparatuses require additional gas-liquid separation devices for each type of processing solution, leading to increased complexity and size when handling multiple kinds of processing solutions.
Innovation Solution
The apparatus features a collection cup with multiple liquid collection regions and adjustable elevating cups that allow for selective discharge of processing solutions through liquid drain openings and separation of gases through exhaust openings, eliminating the need for additional gas-liquid separation devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple gas-liquid separation devices are provided for multiple kinds of processing solutions, then each processing solution can be separated effectively, but the apparatus size and complexity increase significantly
Solution Approach 1:
The patent combines multiple gas-liquid separation functions into a single integrated collection cup structure. The collection cup includes multiple liquid collection regions for different processing solutions, with each region having its own liquid drain opening and exhaust opening. This merging approach eliminates the need for multiple separate gas-liquid separation devices while maintaining effective separation of different processing solutions and their corresponding atmospheres.
Solution Approach 2:
The collection cup is segmented into multiple liquid collection regions, each dedicated to a specific processing solution. Each region has separate liquid drain openings and exhaust openings, allowing independent separation and discharge of different processing solutions and their atmospheres. This segmentation enables effective separation without requiring multiple external devices.
2Reliability
If multiple gas-liquid separation devices are provided for multiple kinds of processing solutions, then each processing solution can be separated effectively, but the apparatus size increases
Solution Approach 1:
The patent merges multiple gas-liquid separation functions into a single collection cup structure that handles multiple processing solutions simultaneously. By integrating multiple liquid collection regions, liquid drain openings, and exhaust openings into one device, the apparatus footprint is significantly reduced compared to using multiple separate gas-liquid separation devices.
Solution Approach 2:
The collection cup utilizes vertical space with elevating cups that can move up and down to select different liquid collection regions. This three-dimensional arrangement allows multiple separation functions to be stacked vertically rather than arranged horizontally, reducing the apparatus's horizontal footprint while maintaining multiple separation capabilities.
3Adaptability or versatility
If elevating cups are made movable to select different liquid collection regions, then selective discharge of processing solutions is enabled, but the device complexity increases
Solution Approach 1:
The elevating cups are designed to be movable rather than fixed, allowing dynamic selection of different liquid collection regions based on which processing solution needs to be discharged. This dynamic capability enables the system to adapt to different processing needs without requiring multiple fixed discharge paths, achieving versatility with a single configurable mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables miniaturization of the apparatus while effectively separating processing solutions and atmospheres, allowing for efficient processing of multiple solution types without additional separation devices.
Implementation Method 1
The collection cup collects the processing solution dispersed around the substrate and an atmosphere around the substrate by centrifugal force caused by the rotation of the substrate
Data Source
AI summary
A substrate liquid processing apparatus is provided, in which a processing solution and an atmosphere can be separated from each other within a collection cup. The substrate liquid processing apparatus includes: a substrate rotation unit; a processing solution supply unit; a collection cup configured to collect the processing solutions; liquid collection regions formed at the collection cup; a liquid drain opening formed at a bottom portion of the collection cup; an exhaust opening formed above the liquid drain opening; a fixed cover configured to cover an upper portion of the exhaust opening with a space therebetween; an elevating cup provided above the fixed cover and configured to guide the processing solutions into the liquid collection regions; and a cup elevating unit configured to move up and down the elevating cup depending on the kinds of the processing solutions.