Collection Cup Lift Design for Precise Substrate Chemical Capture
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Solution Overview
Problem
Conventional substrate processing apparatuses using pneumatic cylinders for height adjustment of collection cups face errors due to friction and weight imbalances, limiting maintenance efficiency and requiring increased maintenance time and costs, with hydraulic driving types restricting height adjustments to only the uppermost or lowermost positions.
Innovation Solution
A substrate processing apparatus employing a motor-driven method for height adjustment of outermost collection cups, allowing three-stage adjustment and a higher liftable height, while inner collection cups use hydraulic driving for two-stage adjustment, ensuring precise control and preventing chemical solution scattering.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If pneumatic cylinders are used for height adjustment of collection cups, then the collection cups can be lifted and lowered, but height adjustment errors occur due to friction and weight imbalances
Solution Approach 1:
The patent replaces the pneumatic cylinder system with a motor-driven system. The motor drives a screw mechanism that converts rotational motion into linear motion for height adjustment. This mechanical substitution eliminates the friction and weight balance issues inherent in pneumatic systems, providing precise and stable height control without the adjustment errors caused by pneumatic pressure variations and internal friction.
Solution Approach 2:
The motor-driven screw mechanism provides self-locking capability through the screw thread geometry. Once the collection cup reaches the desired height, the screw mechanism maintains the position without requiring continuous power input or complex feedback control. The system serves itself by naturally maintaining positional stability through the mechanical advantage and friction characteristics of the screw threads, eliminating the need for additional locking mechanisms or active control systems.
2Ease of operation
If hydraulic driving type is used for collection cup adjustment, then height adjustment is possible, but only uppermost or lowermost positions can be selected with no middle height adjustment
Solution Approach 1:
The motor-driven system provides dynamic and continuous height adjustment capability. Unlike the hydraulic system that is restricted to discrete uppermost or lowermost positions, the motor can rotate continuously or in precise increments, allowing the collection cup to be positioned at any height within the adjustment range. This dynamic control enables flexible adaptation to different operational requirements and intermediate height positions.
Solution Approach 2:
The patent changes the control parameter from discrete hydraulic pressure levels to continuous motor rotation angles. By controlling the motor's rotational position, the system can achieve any height within the screw mechanism's range, transforming the limited two-position hydraulic adjustment into a multi-position or continuous adjustment system that provides greater adaptability.
3Productivity
If outermost collection cup liftable height is increased to collect scattering chemical solution, then collection efficiency improves, but device complexity increases
Solution Approach 1:
The motor-driven screw mechanism serves multiple functions: it provides height adjustment, maintains positional stability through self-locking, and enables precise positioning. By using a single versatile mechanism that combines these functions, the patent avoids the need for separate adjustment mechanisms and control systems that would increase complexity. The universal applicability of the motor-screw system to all collection cups provides a scalable solution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The motor-driven system enables precise and adjustable height control of collection cups, reducing errors and maintaining balance, thereby enhancing the collection efficiency of chemical solutions and minimizing external contamination and maintenance costs.
Implementation Method 1
an outermost third driving part among the driving modules is a motor driving type
Implementation Method 2
an inner driving module disposed inside the third driving part is a hydraulic driving type
Implementation Method 3
one pair of lifting shafts connected to each of the collection cups
Data Source
AI summary
The present disclosure provides a substrate processing apparatus provided with a rotating table for supporting and rotating a substrate and collection cups for collecting treatment solutions sprayed onto the substrate, which includes the collection cups disposed outside the rotating table and each provided therein with a space for collecting the treatment solution, one pair of lifting shafts connected to each of the collection cups, and one pair of driving modules connected to each of the lifting shafts, wherein an outermost third driving part among the driving modules is a motor driving type, an inner driving module disposed inside the third driving part is a hydraulic driving type, and a liftable height of a third collection cup connected to the third driving part and lifted by a third lifting shaft is higher than a liftable height of a collection cup lifted by the inner driving module.