Collector Flow Ring Housing for EUV Debris Mitigation
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Solution Overview
Problem
Traditional EUV radiation source vessels lack a comprehensive solution for preventing fuel debris accumulation, heat management, and optical metrology integration, relying on separate modules that are not modular or upgradeable.
Innovation Solution
A collector flow ring (CFR) housing that integrates showerhead flow, gutter purge flow, shroud mounting, and optical metrology functions into a single apparatus, providing gaseous fluid flows to prevent debris accumulation, heat removal, and metrology access, while allowing for modular design and improved serviceability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate modules are used to address protective hydrogen gases, heat shielding, and metrology field of view, then each function can be individually optimized, but the device complexity increases and serviceability decreases
Solution Approach 1:
The patent combines multiple previously separate modules (perimeter flow ring, collector module, heat shield, metrology equipment) into a single integrated collector flow ring housing. This consolidation maintains all required functions while reducing the number of discrete components, thereby improving serviceability and reducing complexity.
Solution Approach 2:
The collector flow ring housing is designed as a multi-functional component that simultaneously provides protective hydrogen gas flow, heat shielding, metrology field of view, and stray light deflection. This universal design allows a single component to perform multiple functions that previously required separate modules.
2Adaptability or versatility
If multiple separate modules are used to provide different functions, then functional versatility is achieved, but ease of repair and maintenance deteriorates
Solution Approach 1:
By merging multiple functional modules into a single collector flow ring housing, the patent enables easier maintenance and repair. The integrated design allows technicians to service the entire assembly as one unit rather than coordinating multiple separate module maintenances, improving overall serviceability while preserving all required functional capabilities.
3Object-affected harmful factors
If traditional separate modules are used without showerhead flow, then the structure is simpler, but fuel debris accumulation cannot be effectively prevented
Solution Approach 1:
The patent extracts and addresses the fuel debris accumulation problem by implementing a dedicated showerhead flow system with multiple outlets positioned to directly clean the plasma-facing surface. This targeted approach removes the harmful accumulation issue through a specific structural addition rather than redesigning the entire system.
Solution Approach 2:
The showerhead flow channels are specifically positioned and configured to deliver protective gas flows precisely where fuel debris accumulation occurs on the plasma-facing surface. This localized quality enhancement addresses the harmful effect at its specific location without adding unnecessary complexity elsewhere in the system.
4Temperature
If active cooling is added to the collector flow ring, then heat management improves, but device complexity increases
Solution Approach 1:
The active cooling system is merged into the collector flow ring housing structure itself, with cooling channels integrated directly into the housing. This combination provides effective heat removal capability while avoiding the complexity of separate external cooling systems, as the cooling function is built into the existing structural component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The CFR housing enhances serviceability, reduces hardware costs, and improves performance by combining multiple functions into a single, modular unit, effectively managing fuel debris, heat, and metrology in EUV radiation systems, enabling higher power handling and faster maintenance.
Implementation Method 1
a cooling flow channel configured to transport a fluid configured to remove heat from at least a portion of the CFR housing during an EUV radiation generation operation
Implementation Method 2
a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface
Implementation Method 3
a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface
Data Source
Figure 1A
Figure 1B
Figure 2~3
AI summary
Systems, apparatuses, and methods are provided for a collector flow ring (CFR) housing configured to mitigate an accumulation of fuel debris in an extreme ultraviolet (EUV) radiation system. An example CFR housing can include a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the CFR housing. The example CFR housing can further include a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the CFR housing. The example CFR housing can further include a shroud mounting structure configured to support a shroud assembly, a cooling flow channel configured to transport a fluid, and a plurality of optical metrology ports configured to receive a plurality of optical metrology tubes.