Collinear Optical Inspection for Real-Time Laser Surface Control
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Solution Overview
Problem
Current methods for inspecting and controlling laser-induced surface modifications lack real-time, in-situ monitoring and control capabilities, particularly for surface roughness, texture, and chemistry changes, which are crucial for optimizing surface performance in applications like hard disk drives and semiconductor industries.
Innovation Solution
An integrated apparatus and method combining light scatterometry and laser surface processing systems using a bi-directional common optics path to deliver both process and probe laser beams onto a target surface, enabling in-situ inspection and real-time control of laser-induced surface modifications by analyzing scattered light and adjusting laser pulse intensity accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate inspection and laser processing systems are used, then system complexity is reduced, but real-time in-situ monitoring and control capabilities are lost
Solution Approach 1:
The patent combines separate inspection and laser processing systems into an integrated apparatus where a single system performs both functions. The inspection system and laser processing system share common optics and are spatially co-located, enabling real-time in-situ monitoring and control while maintaining reduced overall system complexity through functional integration
2Measurement precision
If traditional inspection methods are used, then equipment cost is reduced, but measurement precision for surface roughness and texture is insufficient
Solution Approach 1:
The patent replaces traditional mechanical contact-based inspection methods with optical-based light scatterometry. This substitution enables non-contact, high-precision measurement of surface roughness and texture by analyzing scattered light patterns, achieving superior measurement precision without mechanical interference
3Manufacturing precision
If laser pulse intensity is not adjusted in real-time, then process speed is maintained, but manufacturing precision of surface modifications deteriorates
Solution Approach 1:
The patent implements a feedback control mechanism where the inspection system continuously monitors surface modifications in real-time, and the controller adjusts laser pulse intensity based on the inspection results. This closed-loop feedback enables precise control of surface modifications while maintaining high processing speed through automated real-time adjustments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise, real-time monitoring and control of laser-induced surface changes, enhancing surface cleanliness, roughness, and optical properties, thereby improving the effectiveness of laser surface modification processes and optimizing surface performance.
Implementation Method 1
Light scatterometry is a method for making the measurements of a surface by analyzing the angles (and/or intensity) of refracted light projected on the surface
Implementation Method 2
analyzing the angles (and/or intensity) of refracted light projected on the surface
Implementation Method 3
laser surface modification process, in-situ surface inspection of the laser-treated surface, and in-situ control of the laser process
Implementation Method 4
laser-induced surface changes
Data Source
AI summary
The embodiments disclose a method for in-situ inspection and processing of an object including providing a pulsed laser source during the in-situ inspection of a surface of the object for modifying at least one of an optical, mechanical, or chemical property of a first region of the surface, directing the laser source through an optics path to shape, position and focus a pulsed laser beam at the first region, directing a probe illumination light beam to the optics path to produce a combined and collinear optical light path of the probe illumination light beam and the pulsed laser beam to focus and deliver the combined and collinear optical light path at a same region on the surface, superimposing a first focus spot of the probe illumination light beam over a second focus spot of the pulsed laser beam on an illuminated region of the surface.