Collision-Perforated Filler Member for Uniform Substrate Drying
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Solution Overview
Problem
Existing substrate treating apparatuses using supercritical drying processes have limitations in increasing the turbulence intensity of drying gases, which can disrupt patterns on substrates and reduce the efficiency of residual fluid displacement.
Innovation Solution
A substrate treating apparatus with a filler member featuring perforations that induce collisions among treatment fluids, increasing turbulence intensity and enhancing atomization efficiency by intersecting discharge paths of the fluids.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple plate shape filler member is used, then the device complexity is reduced, but the turbulence intensity of the drying gas cannot be increased sufficiently
Solution Approach 1:
The filler member is segmented into multiple functional zones: a buffer zone (first space) for fluid accumulation and a treatment zone (second space) for substrate processing. The plate is divided into a buffer region and a treatment region, creating distinct functional areas that work together to enhance turbulence while maintaining structural simplicity.
Solution Approach 2:
The buffer space in the filler member performs preliminary action by accumulating treatment fluid before it enters the treatment space. This pre-accumulation allows the fluid to build up pressure and velocity, creating enhanced turbulence when it is released into the treatment space, thereby improving drying efficiency without complex mechanisms.
2Loss of time
If the treatment fluid is supplied directly to the substrate, then the process time is reduced, but the atomization efficiency is insufficient and patterns may be disrupted
Solution Approach 1:
The filler member creates local quality differences by providing a buffer space in specific regions (buffer region) while allowing direct treatment in other regions (treatment region). This localized buffering enhances atomization efficiency in critical areas without significantly extending the overall process time, thereby protecting substrate patterns while maintaining drying speed.
3Productivity
If the turbulence intensity is increased to improve residual fluid displacement, then the drying efficiency is improved, but the risk of disrupting substrate patterns increases
Solution Approach 1:
The filler member acts as an intermediary between the treatment fluid supply and the substrate. It buffers and conditions the fluid flow, transforming high-velocity direct impingement into controlled turbulence. This intermediary function allows enhanced residual fluid displacement while protecting substrate patterns from direct high-impact forces that could cause disruption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves uniform drying of substrates by enhancing turbulence intensity, improving the efficiency of residual fluid displacement and reducing process time while maintaining process performance.
Implementation Method 1
the filler member has perforations, and the perforations are provided in a collision shape such that treatment fluids passing through the perforations collide each other
Implementation Method 2
both the temperature and pressure of the drying gas rise to the critical point or higher, and the drying gas undergoes a phase change to a supercritical state
Implementation Method 3
the drying gas is supplied with supercritical drying gas (for example, carbon dioxide) to remove the residual organic solvent from the substrate
Data Source
AI summary
Disclosed is a substrate treating apparatus including: a chamber providing a treatment space therein; a substrate support member located inside the chamber and for supporting a substrate; a supply port for supplying a treatment fluid into the treatment space of the chamber; a filler member located between the supply port and the substrate to fill a portion of a volume of the treatment space, in which the filler member has perforations, and the perforations are provided in a collision shape such that treatment fluids passing through the perforations collide each other.