Color-Changing Indicator for Plasma Treatment Uniformity

The patent uses a dummy substrate that replicates the physical and chemical properties of the actual substrate to be treated. This dummy substrate serves as a simplified copy that can be used for measurement purposes without requiring complex measurement equipment. The dummy substrate is placed in the plasma treatment chamber along with the actual substrates, and after treatment, the plasma uniformity is assessed by examining the dummy substrate's surface characteristics, thereby avoiding the need for Langmuir probes or emission spectrometers.

The dummy substrate acts as an intermediary between the plasma treatment process and the evaluation of treatment uniformity. Instead of directly measuring plasma parameters with complex instruments, the dummy substrate mediates the interaction by absorbing the plasma treatment effects, which can then be visually or microscopically examined to infer plasma uniformity without requiring direct plasma measurement.

The dummy substrate serves as a passive copy that remains in the chamber throughout the plasma treatment process without requiring installation or removal. It naturally records the plasma treatment effects on its surface, eliminating the need to break vacuum for probe installation and removal, thereby maintaining operational simplicity while still enabling plasma uniformity assessment.

The dummy substrate performs the measurement function automatically during the plasma treatment process without requiring separate measurement operations. As plasma treats the substrates, the dummy substrate simultaneously accumulates treatment effects that reflect plasma uniformity, eliminating the need for separate measurement steps and maintaining continuous vacuum conditions.