Color Filter Array Cleaning via Rotating Substrate and Intersecting Nozzle
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Solution Overview
Problem
Periodical unevenness in captured images is caused by variations in the thickness of color filters in imaging apparatuses, particularly due to the two-fluid cleaning method used in forming color filter arrays, leading to reduced image quality.
Innovation Solution
The method involves rotating the color filter array and moving a nozzle to spray fluid in a direction intersecting with its axis, ensuring the amplitude of thickness variation across color filters is 2.0% or less of the average thickness, with the thickness of each color filter being less than 0.75 μm and varying at an interval of 10 times or more of the pixel size, to minimize thickness changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If the two-fluid cleaning method is used to remove residues from the color filter film, then cleaning power and residue removal are improved, but periodical unevenness is generated in the captured image due to thickness variation of color filters
Solution Approach 1:
The invention applies dynamic cleaning by rotating the substrate during the two-fluid cleaning process. The substrate rotation speed is controlled to be 1/10 or more of the nozzle reciprocation speed, creating a dynamic interaction between the cleaning fluid and the color filter film that prevents localized over-cleaning while maintaining effective residue removal across the entire surface.
Solution Approach 2:
The invention employs periodic reciprocation of the nozzle in conjunction with continuous substrate rotation. The nozzle moves back and forth periodically while the substrate rotates continuously, creating a distributed cleaning pattern that evenly spreads the cleaning action across the color filter film, preventing concentration of cleaning effects in specific regions that would cause thickness variation.
2Area of stationary object
If the nozzle is moved horizontally reciprocating while spraying fluid, then cleaning coverage is improved, but periodical unevenness with period P of 1 to 10 mm is generated in the imaging region
Solution Approach 1:
The invention transforms the static horizontal reciprocation into a dynamic cleaning process by simultaneously rotating the substrate. This dynamic combination ensures that each region of the color filter film receives cleaning fluid from different angles and positions during the reciprocation cycle, distributing the cleaning effect uniformly and eliminating the periodic patterns that would otherwise be imprinted on the film thickness.
Solution Approach 2:
The invention introduces asymmetry by rotating the substrate during cleaning, breaking the symmetric reciprocation pattern of the nozzle. This asymmetric motion ensures that no single periodic path is repeated in the same location, thereby preventing the formation of periodic unevenness in the color filter thickness that would correspond to the nozzle reciprocation period.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the periodical unevenness in images, enhancing image quality by maintaining consistent color filter thickness and minimizing sensitivity variations across pixels, thereby improving imaging characteristics.
Implementation Method 1
residues generated during the development can be removed by physical pressure caused by droplets sprayed in an accelerated manner
Implementation Method 2
a step of exposing a photosensitive color filter film
Data Source
AI summary
A method for forming a color filter array includes a step of exposing a photosensitive color filter film, a step of forming a color filter array from the color filter film by developing the color filter film using a developer, and a step of cleaning the color filter array while rotating the color filter array and moving a nozzle for spraying fluid containing liquid and gas above the color filter array in a direction intersecting with an axis of the rotation. The method reduces variation in thickness of a color filter that is generated in the cleaning step.