Color Selection Module With Reflected Beam Reuse

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Solution Overview

Problem

Existing color selection modules in lithographic and metrology tools can only select a single color for measurements, leading to inefficient use of unfiltered radiation and limited measurement capabilities.

Innovation Solution

A color selection module with a first and second reflector and an optical filter that allows for selective transmission and reflection of different wavelength bands, enabling multiple colors to be selected and reused for parallel or sequential measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a single color selection module is used, then the device complexity is reduced, but the measurement efficiency and versatility are limited

Engineering Contradiction:

Improvemeasurement efficiencyVSAvoiddevice complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent implements continuous useful action by recycling the reflected radiation beam back through the optical filter via a second reflector. Instead of discarding the reflected beam, the system continuously reuses it for additional wavelength selection, maximizing the utilization of the input radiation beam and enabling multiple colors to be selected sequentially or in parallel

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The color selection module achieves multi-functionality by using the same optical filter and reflector assembly to select multiple different wavelengths. The system can operate in different modes (single color, multiple colors sequentially, or multiple colors in parallel) using the same hardware components, eliminating the need for separate filter modules for each wavelength

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Use of energy by moving object

If the reflected light is discarded to a beam dump, then the device complexity is reduced, but the energy utilization efficiency deteriorates

Engineering Contradiction:

Improveenergy utilization efficiencyVSAvoiddevice complexity

Core Design Contradiction:

Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent applies the discarding and recovering principle by capturing the reflected radiation beam that would otherwise be discarded to a beam dump. The second reflector redirects this reflected beam back through the optical filter, recovering the unused energy and enabling additional wavelength selections from the same input beam

Inventive Principle:

Principle #34Discarding and recovering

Solution Approach 2:

The system converts the harmful effect of energy waste (reflected beam being discarded) into a beneficial resource. The reflected beam, which would represent lost energy, is instead redirected and reused for additional color selection, transforming energy loss into productive measurement capability

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances measurement efficiency by reusing reflected light for additional filtering, allowing for multiple colors to be selected and directed to different outputs, facilitating parallel multicolor measurements.

Implementation Method 1

The optical filter is configured to depending on the first impinging characteristic of the radiation beam selectively transmit a first transmitted radiation beam comprising a first portion of the wavelength band and reflect a first reflected radiation beam comprising a second portion of the wavelength band

Methodology Applied

Scientific EffectOptical filtering: Filter (optical)

Implementation Method 2

The first reflector is configured to receive the radiation beam and direct the radiation beam towards the optical filter

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 3

The second reflector is configured to receive the first reflected radiation beam and direct the first reflected radiation beam towards the optical filter

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentEP4685560A2Color selection module

Publication Date: 2026.01.28 ASML NETHERLANDS BV

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AI summary

This application provides a color selection module, and a method, for filtering a radiation beam having radiation comprising a wavelength band. The color selection module comprises: a first reflector; a second reflector and an optical filter. The first reflector has selectable configurations and is configured to receive the radiation beam and direct the radiation beam towards the optical filter. The selectable configurations control a first impinging characteristic of the radiation beam. The optical filter is configured to depending on the first impinging characteristic of the radiation beam selectively transmit a first transmitted radiation beam and reflect a first reflected radiation beam. The second reflector is configured to receive the first reflected radiation beam and direct the first reflected radiation beam towards the optical filter. The optical filter is further configured to depending on a second impinging characteristic of the first reflected beam selectively transmit a second transmitted radiation beam.