Color Resist Mask Sheet Single-Mask Alignment
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Solution Overview
Problem
The high production cost of manufacturing color film substrates in LCD technology is due to the need for two masks to align and coat RGB color resist, resulting in increased manufacturing complexity and costs.
Innovation Solution
A color resist mask sheet with an align test mark region, an align coat mark region, and a pattern mask region, where each align test mark corresponds to an align coat mark, and the spaces between them are determined based on pixel spacing and the exposure region of a mask aligner stepper, allowing for simultaneous alignment and coating on a single mask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If two masks are used to conduct aligning operation for manufacturing RGB color resist, then the color resist can be formed on color film substrate, but the production cost increases
Solution Approach 1:
The patent combines two separate masks (alignment mask and color resist mask) into a single integrated mask sheet. The mask sheet includes an alignment mark region with align marks for positioning, a color resist pattern region with RGB patterns for color formation, and a test pattern region for quality verification. This merging eliminates the need for separate alignment operations and reduces production costs while maintaining color resist formation quality.
Solution Approach 2:
The single mask sheet performs multiple functions simultaneously: it provides alignment marks for positioning, contains the color resist patterns for forming RGB colors, and includes test patterns for quality control. This multi-functionality replaces the need for multiple specialized masks and operations, reducing complexity and cost while ensuring reliable color resist formation.
2Manufacturing precision
If two masks are used for aligning operation, then complete color resist coating is achieved, but manufacturing complexity increases
Solution Approach 1:
The patent integrates the alignment mark region, color resist pattern region, and test pattern region into a single mask sheet. This eliminates the complexity of coordinating two separate masks and their respective alignment operations, while still achieving complete and precise color resist coating through the unified design.
Solution Approach 2:
The mask sheet is designed in advance with pre-positioned alignment marks and precisely spaced color resist patterns. The alignment marks are positioned at predetermined locations, and the RGB patterns are arranged with specific spacing relationships established during mask fabrication. This preliminary arrangement eliminates the need for complex real-time alignment operations and reduces manufacturing complexity.
Data Source
AI summary
The present invention provides a color resist mask sheet and a method of use thereof. The color resist mask sheet includes an align coat mark region and an align test mark region. The align coat mark region includes a plurality of equally spaced align coat marks of coat color resist; the align test mark region includes a plurality of equally spaced align test marks for coating the test color resist, wherein each align test mark corresponds to each align coat mark.