Color Selection Module Using Actuatable Mirror and Fixed Filter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing wavelength selection systems in lithographic and metrology devices are costly due to the use of expensive actuators and optical components with moving parts, which are prone to wear and limit design flexibility.
Innovation Solution
A color selection module comprising a light input, an actuatable mirror, a filter, and a return mirror, which allows for the selection of a selectable wavelength band without the need for complex actuators downstream, using a return mirror to redirect filtered light, thereby reducing costs and increasing design flexibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If actuators and optical components with moving parts are used for wavelength selection, then wavelength band selection capability is achieved, but device complexity and cost increase
Solution Approach 1:
The patent extracts the moving parts (actuators and tiltable mirrors) from the optical path, replacing them with a fixed filter array. The wavelength selection is achieved by directing light to different spatial positions on the fixed filter array rather than physically moving optical components, thereby reducing device complexity while maintaining wavelength selection capability
Solution Approach 2:
The patent replaces the mechanical actuation system with an optical steering approach. Instead of using actuators to tilt mirrors for wavelength selection, the system uses a fixed filter array where different wavelengths are selected by directing light to different spatial positions on the filter, substituting mechanical movement with optical path control
2Adaptability or versatility
If actuators and optical components with moving parts are used for wavelength selection, then wavelength band selection capability is achieved, but cost increases
Solution Approach 1:
The patent removes expensive actuators and tiltable mirrors from the system, replacing them with a static filter array. This extraction of moving parts significantly reduces the bill of materials cost while preserving the core functionality of wavelength band selection through spatial positioning on the fixed filter
Solution Approach 2:
The patent replaces expensive, wear-prone mechanical components with a simpler, static filter array that has no moving parts. The fixed filter array is a lower-cost alternative that eliminates the need for expensive actuators and complex optical mounting hardware
3Adaptability or versatility
If actuators and optical components with moving parts are used for wavelength selection, then wavelength band selection capability is achieved, but reliability decreases due to wear
Solution Approach 1:
The patent extracts all moving parts (actuators, tiltable mirrors) from the optical path, leaving only fixed, stationary components. The filter array is fixed in place with no moving parts, eliminating wear mechanisms and improving system reliability while maintaining wavelength selection through spatial control
Solution Approach 2:
The patent replaces the mechanical actuation system with a static optical system. Instead of mechanically moving mirrors or filters to select wavelengths, the system uses a fixed filter array where wavelength selection is achieved by directing light to different spatial positions, eliminating mechanical wear and improving reliability
4Adaptability or versatility
If actuators and optical components with moving parts are used for wavelength selection, then wavelength band selection capability is achieved, but design volume flexibility is limited
Solution Approach 1:
The patent removes bulky actuators and tiltable mirror assemblies from the optical path, replacing them with a compact fixed filter array. This extraction of moving parts significantly reduces the required design volume while maintaining full wavelength selection capability through spatial positioning on the fixed filter
Solution Approach 2:
The patent replaces the mechanically complex wavelength selection system with a compact static optical system. The fixed filter array requires no actuation space or mechanical clearance, allowing for a more compact overall design volume while preserving wavelength band selection functionality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces costs and complexity while enhancing the flexibility of wavelength selection, allowing for more efficient and adaptable filtering of light beams in lithographic and metrology applications.
Implementation Method 1
The actuatable mirror receives the input light beam and reflects the input light beam towards a selectable position on the filter
Implementation Method 2
The filter receives the reflected input light beam from the actuatable mirror on the selectable position and filters the selectable wavelength band from the reflected input light beam
Implementation Method 3
The return mirror reflects the filtered light beam with the selectable wavelength band towards the actuatable mirror
Data Source
Figure 1
Figure 2
Figure 3
AI summary
This application provides a color selection module, and a method, for filtering a selectable wavelength band. The color selection module comprises a light input; a light output; a filter; an actuatable mirror, and a return mirror. The light input receives an input light beam. The actuatable mirror receives the input light beam and reflects the input light beam towards a selectable position on the filter. The actuatable mirror is configured for selecting the position by actuation. The filter receives the reflected input light beam from the actuatable mirror on the selectable position and filters the selectable wavelength band from the reflected input light beam. The return mirror reflects the filtered wavelength band towards the actuatable mirror, and the actuatable mirror reflects the filtered selectable wavelength band towards the light output. The light output outputs light of the selectable wavelength band.