Color-Mixing Light Source for Line-Width Measurement
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Solution Overview
Problem
Conventional line-width measurement devices face accuracy issues due to limited illumination choices, which result in significant differences in color contrast between the pattern under measurement and the standard pattern, affecting the precision of line-width measurements.
Innovation Solution
A line-width measurement device equipped with a color-mixing light source device comprising red, blue, and green monochromatic light sources, which adjusts brightness scales to provide 256 kinds of colored illumination, ensuring suitable color contrast matching with the standard pattern, thereby enhancing measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If five kinds of filter units are used in the light source device, then the device structure is simple, but the illumination choices are limited and cannot adequately match different pattern materials
Solution Approach 1:
The patent changes the parameter of light source configuration from a fixed set of five filter units to a variable combination of multiple monochromatic light sources (red, green, blue, yellow-green, yellow, orange). By adjusting the intensity parameters of each monochromatic source, the system can generate 256 different colored illuminations, significantly improving adaptability while maintaining manageable device complexity through electronic control.
Solution Approach 2:
The patent applies the composite principle by combining multiple monochromatic light sources (red, green, blue, yellow-green, yellow, orange) to create a composite illumination system. This composite light source can produce a wide spectrum of colors through additive mixing, analogous to how composite materials combine different properties to achieve superior performance.
2Measurement precision
If only five kinds of colored illumination are provided, then the device complexity is low, but the color contrast matching with standard pattern is insufficient
Solution Approach 1:
The system adjusts the intensity parameters of each monochromatic light source based on the matching rate between the captured image and standard pattern. When the matching rate is below a threshold, the controller automatically adjusts the brightness parameters of individual light sources to optimize color contrast, thereby improving measurement precision without requiring manual intervention.
Solution Approach 2:
The patent implements a feedback mechanism where the controller continuously monitors the matching rate between the captured pattern image and the standard pattern. Based on this feedback, the system automatically adjusts the intensity of each monochromatic light source to achieve optimal color contrast matching, ensuring high measurement accuracy.
3Measurement precision
If the gray scale image has big difference in color contrast with standard pattern, then the measurement process is simple, but the measurement accuracy deteriorates
Solution Approach 1:
The system performs self-adjustment by automatically detecting the color contrast mismatch between the captured image and standard pattern, then autonomously adjusting the intensity of each monochromatic light source to optimize the matching rate. This self-service capability eliminates the need for manual intervention while ensuring high measurement accuracy.
Solution Approach 2:
The controller uses feedback from the image matching process to automatically adjust light source intensities. When the matching rate indicates poor color contrast, the system responds by adjusting the brightness parameters of individual monochromatic sources until optimal matching is achieved, thereby maintaining high measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly improves the accuracy of line-width measurements by reducing color contrast differences between the pattern under measurement and the standard pattern, allowing for precise line-width determination.
Implementation Method 1
a color-mixing light source device mounted above the platform, including a plurality of monochromatic light sources and adjusting brightness scale of each of the monochromatic light sources
Data Source
AI summary
A line-width measurement device and a measurement method using the same are disclosed. The line-width measurement device has a platform, an image capturing device and a color-mixing light source device. The image capturing device captures an image of a pattern under measurement in a measurement area of the platform. The color-mixing light source device correspondingly provides illumination to the measurement area. The color-mixing light source device has a plurality of monochromatic light sources and adjusts the brightness scale of each monochromatic light source according to the matching rate of the pattern under measurement and a standard pattern to provide suitable color-mixed lights for illumination. Therefore, the present invention can provide a better measurement environment to further enhance accuracy of line-width measurement.