Columnar Electrode Electric Field Correction for E-Beam Inspection
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Solution Overview
Problem
The miniaturization of semiconductor device templates in the imprint lithography process makes pattern inspection and measurement more difficult due to the finer features, requiring improved accuracy and precision in image acquisition methods.
Innovation Solution
An electron beam device with a retarding electrode system that includes independently controlled columnar electrodes, which apply localized voltages based on structure information to correct the electric field distribution on the template surface, allowing for more uniform electron beam incidence and enhanced image acquisition accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the template pattern is miniaturized to manufacture smaller semiconductor devices, then the semiconductor device size is reduced, but the inspection and measurement accuracy of the pattern becomes more difficult
Solution Approach 1:
The patent applies local quality by dividing the electrode into multiple independently controllable columnar electrodes that can apply different voltages to different regions of the sample. This localized control allows for correcting electric field non-uniformities in specific areas, thereby improving overall image acquisition accuracy for miniaturized patterns without requiring uniform changes across the entire system.
Solution Approach 2:
The patent utilizes parameter changes by dynamically adjusting the voltage applied to each columnar electrode based on the sample structure information. By changing the voltage parameters locally across different electrode columns, the system compensates for electric field distortions caused by sample topography, enabling accurate inspection of miniaturized features.
2Device complexity
If a uniform voltage is applied to the sample via a simple electrode, then the device complexity is low, but the electric field distribution on the sample surface becomes non-uniform due to sample structure variations
Solution Approach 1:
The patent applies segmentation by dividing the electrode into multiple columnar electrodes that can be independently controlled. This segmentation allows each column to adjust its voltage output to compensate for local variations in sample structure, thereby achieving uniform electric field distribution across the entire sample surface while managing complexity through modular design.
Solution Approach 2:
The patent implements dynamics by making the electrode system adjustable and adaptive rather than fixed. The columnar electrodes can dynamically change their voltage output based on real-time sample structure information, allowing the electric field distribution to be optimized for each specific sample configuration rather than relying on a static uniform voltage approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables more accurate inspection and measurement of fine patterns by ensuring a uniform electric field and improved image reflection of the template surface, enhancing measurement precision and reducing noise in the acquired images.
Implementation Method 1
an electrode for applying voltages to a sample supported by the support... generate correction data for adjusting a distribution of an electric field generated in the sample when a voltage is applied to the sample via the electrode
Data Source
AI summary
According to one embodiment, an electron beam device includes a support which supports the sample and an electrode disposed below the sample on the support The electrode is for applying a voltage to the sample and includes a plurality of columnar electrodes that can be independently controlled to apply different voltages to portions of the sample. A controller for generating correction data for correcting the distribution of an electric field generated across the area of the sample. The correction data is generated based on structure information indicating a structure of the sample. The controller controls the plurality of columnar electrodes to apply local voltages set based on the correction data.