Optical Comb Electrode Support Ribs to Prevent Swing Distortion
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Solution Overview
Problem
The movable comb electrodes in existing optical devices are distorted during the swinging motion of the movable unit, leading to potential reliability issues due to the support portion extending from the torsion bars, which can cause deviation and distortion of the comb fingers.
Innovation Solution
The optical device incorporates support portions with rib portions that have increased thickness compared to the torsion bars, ensuring the movable comb electrodes swing integrally with the movable unit, and includes connection portions that are bent to avoid direct contact with the torsion bars, reducing distortion and maintaining consistent intervals between comb fingers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the movable comb electrode is provided in a support portion that extends from the movable unit along the torsion bars, then the comb electrode can be positioned and connected, but the movable comb electrode becomes distorted when the movable unit swings
Solution Approach 1:
The support portion is divided into two separate support portions (first support portion and second support portion) that are disposed on opposite sides of the movable unit. Each support portion independently supports the movable comb electrode, preventing distortion by distributing the mechanical stress and avoiding concentration of force at a single extension point along the torsion bars.
Solution Approach 2:
The support portions act as intermediary elements between the movable unit and the movable comb electrode. Instead of directly extending along the torsion bars, the support portions provide a stable connection that isolates the comb electrode from the twisting motion of the torsion bars, maintaining constant intervals between comb fingers during swinging motion.
2Device complexity
If the support portion extends from the movable unit along the torsion bars, then the structure is simplified, but distortion occurs causing reliability deterioration
Solution Approach 1:
The support structure is segmented into multiple discrete support portions positioned at strategic locations around the movable unit. This segmentation prevents the need for a single complex extension along the torsion bars while maintaining structural simplicity through modular, symmetric placement of support elements.
Solution Approach 2:
The support portions are disposed asymmetrically with respect to the torsion bars, positioned on opposite sides of the movable unit rather than extending along the bar axes. This asymmetric arrangement decouples the support function from the torsional motion path, eliminating distortion while keeping the overall structure simple.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the reliability of the optical device by preventing distortion of the movable comb electrodes and maintaining consistent intervals, even when the movable and fixed electrodes for driving, an optical device with high reliability, and enhancing the reliability of the optical device with high reliability, and improving controllability in drive signal settings.
Implementation Method 1
a first torsion bar that is disposed on one side of the movable unit in a first direction, and is connected to the base and the movable unit; a second torsion bar that is disposed on the other side of the movable unit in the first direction, and is connected to the base and the movable unit
Implementation Method 2
a voltage is applied to between the movable comb electrode and the fixed comb electrode to swing the movable unit with a predetermined axial line set as a central line
Implementation Method 3
electrostatic capacitance between the movable comb electrode and the fixed comb electrode is detected to understand a position (a swing angle) of the movable unit
Data Source
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AI summary
In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit on one side in a second direction, between a second support portion and a second end of the movable unit on the other side in the second direction, between a third support portion and the first end of the movable unit, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.