CVD Heating Device Coplanar Contact Plates
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Solution Overview
Problem
Existing heating elements in CVD reactors experience irreversible deformation due to thermal stresses, leading to short circuits and device destruction, with the issue exacerbated by varying terminal contact lengths and inadequate isolation between contact plates.
Innovation Solution
The contact plates are arranged in a shared plane with comb-like extensions and ceramic spacing, ensuring equal terminal contact lengths and maintaining isolation, while resistance heating units are arranged along spiral or circular arc lines, supported by non-conductive elements to manage thermal stress and enhance structural integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the contact plates are arranged in parallel planes with larger distance from the resistance heating unit, then the isolation between contact plates is improved, but the thermal stresses cause irreversible deformation of the contact plates
Solution Approach 1:
The contact plates are arranged in a shared first plane instead of parallel planes, changing the spatial dimension from three-dimensional separation to two-dimensional coplanar arrangement. This dimensional change allows the terminal contacts to be the same length and reduces thermal stress while maintaining isolation through comb-like extensions and spacing means.
Solution Approach 2:
Non-conductive spacing means are introduced as intermediary elements between the contact plates to provide isolation. These spacing means prevent direct contact between the conductive plates while allowing the plates to be in the same plane, thus reducing thermal stress and preventing deformation.
2Reliability
If the terminal contacts vary in length, then the connection to contact plates is improved, but the thermal stresses arise while heating or cooling the resistance heating units
Solution Approach 1:
The terminal contacts are made homogeneous in length, with both terminal contacts being the same length. This uniformity allows for symmetric thermal expansion and contraction during heating and cooling cycles, preventing the generation of thermal stresses that would occur with unequal length contacts.
3Reliability
If the openings in the first contact plate are larger than the diameter of the second terminal contacts, then the isolation is improved, but short circuit bars form after prolonged use and repeated heating and cooling
Solution Approach 1:
Non-conductive spacing means are introduced as intermediary elements between the contact plates to provide isolation. These spacing means prevent direct contact between the conductive plates, eliminating the risk of short circuit bar formation even after prolonged use and repeated thermal cycles.
4Ease of manufacture
If the contact plates are arranged in a shared plane with equal terminal contact lengths, then the manufacturing costs are reduced, but the isolation between contact plates must be maintained
Solution Approach 1:
The contact plates are segmented with comb-like extensions that intermesh with each other. This segmentation allows the plates to be in the same plane with equal terminal contact lengths for easier manufacturing, while the intermeshing extensions and spacing means maintain the necessary electrical isolation between the conductive plates.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases the service life of the heating device, reduces manufacturing costs, and prevents contamination of the processing chamber by minimizing mechanical stress and ensuring consistent heat output across heating elements.
Implementation Method 1
heat is generated by a current flowing through a resistance heating unit
Data Source
AI summary
A device includes at least a first electrically conductive contact plate, at least a second electrically conductive contact plate and a plurality of heating elements connected electrically in parallel. Each of the plurality of heating elements includes at least one resistance heating unit, respectively. Each of the heating elements is connected by means of a first connecting contact to the heating elements is connected by means of a first connecting contact to the first contact plate and by means of a second connecting contact to the second contact plate, in which both contact plates lie in a common first plane. The resistance heating units are arranged along a spiral or arched line around a center of the device. To expand the service life of the device at reduced manufacturing costs, a plurality of heating units are arranged consecutively or nested with each other along the ached or spiral line, and both the first and second contact plates comprise interlocking comb-like contact extensions.