Combined Optical Path Processing for Precise In-Situ Measurement
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Solution Overview
Problem
Existing processing systems struggle to accurately and efficiently process and measure objects using combined processing and measurement lights, particularly in terms of positional alignment and resolution.
Innovation Solution
A processing apparatus that combines the optical paths of processing and measurement lights, incorporates an irradiation optical system for precise positioning, and includes a position change apparatus to adjust the relative positions of these lights on the object, along with detection and measurement systems for enhanced accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If processing light and measurement light are combined in the same optical path, then measurement can be performed during processing, but positional alignment between processing and measurement lights becomes difficult to control
Solution Approach 1:
The patent introduces a new degree of freedom by adding an irradiation position change optical system that operates independently from the optical path combining system. This allows positional adjustment of processing and measurement lights in a separate dimensional space, resolving the alignment difficulty while maintaining the benefit of combined optical paths for simultaneous measurement and processing
2Manufacturing precision
If separate optical paths are used for processing and measurement lights, then positional control is easier, but system complexity increases
Solution Approach 1:
The patent merges the processing light optical path and measurement light optical path into a common path after separate generation, allowing both functions to share the same delivery mechanism to the object. This reduces system complexity compared to fully separate paths while maintaining independent positional control through the added irradiation position change optical system
3Adaptability or versatility
If irradiation positions of processing and measurement lights are independently adjustable, then alignment flexibility improves, but device complexity increases
Solution Approach 1:
The irradiation position change optical system serves multiple functions simultaneously: it adjusts the irradiation position of processing light, adjusts the irradiation position of measurement light, and enables independent positioning of both lights. This multi-functionality provides high alignment flexibility without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise processing and measurement of objects with improved resolution and alignment, allowing for effective formation of structures like riblet structures and accurate marking, while optimizing the positional relationship between processing and measurement lights.
Implementation Method 1
a combining optical system that combines an optical path of processing light from a processing light source and an optical path of measurement light including pulsed light
Implementation Method 2
an irradiation optical system that irradiates the object with the processing light and the measurement light that are through the combining optical system
Data Source
AI summary
A processing apparatus processes an object by irradiating the object with a processing light, and includes: a combining optical system that combines an optical path of the processing light from the processing light source and an optical path of a first measurement light from a measurement light source; an irradiation optical system that irradiates the object with processing light and the first measurement light through the combining optical system; a position change apparatus that changes a position of the irradiation optical system relative to the object; an imaging apparatus a position of which is changed together with the irradiation optical system and which captures an image of the object; and a detection apparatus that detects, through the irradiation optical system and the combining optical system, a second measurement light generated from the object due to the first measurement light with which the object is irradiated through the irradiation optical system.