Combined Round-Multipole Magnetic Lens for Compact Desktop Electron Microscopes
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Solution Overview
Problem
Conventional desktop electron microscopes require multiple power supplies due to the use of multipole lenses, leading to increased volume and complexity in aberration correction, which hinders the miniaturization of the instrument.
Innovation Solution
A combined round-multipole magnetic lens design that integrates both multipole and focusing functions using a coil support, first and second pole pieces, and pole shoes, allowing for adjustable magnetic field distribution with a single power supply, reducing the occupied volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple multipole lenses are used for aberration correction, then the image resolution is improved, but the device volume and complexity increase due to requiring multiple power supplies
Solution Approach 1:
The patent combines multiple multipole lenses (quadrupole, hexapole, octupole) into a single integrated lens structure that shares a common power supply. This merging approach maintains the aberration correction capabilities while reducing the overall device volume and simplifying the power supply system, directly resolving the contradiction between high-resolution imaging and compact device size
Solution Approach 2:
The integrated multipole lens performs multiple functions simultaneously - it provides aberration correction for various types (chromatic, spherical, coma) while being powered by a single power supply. This multi-functionality eliminates the need for separate lenses and power supplies for each correction type, thereby reducing device volume while maintaining image resolution
2Reliability
If multiple multipole lenses with multiple power supplies are used, then the aberration correction function is improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple independent multipole lens systems into a single integrated lens that uses one power supply. This consolidation maintains comprehensive aberration correction functionality while significantly reducing device complexity by eliminating redundant components and simplifying the control system
Solution Approach 2:
The single integrated lens is designed to perform multiple aberration correction functions simultaneously through its multi-pole structure, making the system more reliable while reducing complexity. The universal design allows one lens to replace what previously required several separate lenses and power supplies
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables effective aberration correction and focusing with reduced volume requirements, allowing for a more compact desktop electron microscope while maintaining the functionality of multipole lenses.
Implementation Method 1
When the coil is fed with an electric current, the first pole shoe, the magnetic-circuit gap and the second pole shoe form a first magnetic circuit
Implementation Method 2
The combined round-multipole magnetic lens is a tunable magnetic lens with both the functions of multipole and focus simultaneously
Data Source
AI summary
A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.