Combined Valve Internal Joint Mounting for Space Reduction
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Solution Overview
Problem
Conventional combined valves for semiconductor manufacturing require additional installation space due to the protrusion of the joint connecting the operation port and the pilot valve, which is not suitable for size reduction demands in semiconductor manufacturing lines.
Innovation Solution
The combined valve design incorporates a housing with a storage opening part of larger diameter to internally house the joint, featuring a flange with a communication passage and sealing members to allow the joint to be mounted without protrusion, enabling the pilot valve to adjust pneumatic pressure and perform opening/closing operations without external joint protrusion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the joint is externally connected to the operation port, then the pilot valve can be supplied with operation air, but the valve assembly requires additional installation space due to joint protrusion
Solution Approach 1:
The joint is nested inside the housing of the combined valve. The housing includes a joint holding space that accommodates the joint, allowing the joint to be stored internally rather than protruding externally. This nesting approach reduces the overall installation space while maintaining the functionality of the pilot valve connection.
2Volume of moving object
If the housing thickness is reduced to accommodate the manual mechanism, then the valve size is reduced, but the joint cannot be built into the housing and must protrude externally
Solution Approach 1:
The joint holding space is created by utilizing the radial dimension of the housing. The storage opening part has a larger diameter than the holding hole, creating a radial space where the joint can be accommodated. This dimensional approach allows the joint to be built into the housing without increasing the axial length of the valve.
3Volume of moving object
If the joint is internally mounted in the housing, then the valve size is reduced, but the joint must be sealed to prevent gas leakage
Solution Approach 1:
A sealing member is introduced as an intermediary element between the joint and the joint holding space. The sealing member fits around the joint and prevents gas leakage into the joint holding space, ensuring reliable sealing while maintaining the compact internal mounting structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for size reduction by internal mounting of the joint, maintaining the functionality of the pilot valve while reducing the overall size of the valve assembly, thus addressing the space constraints in semiconductor manufacturing environments.
Implementation Method 1
The pilot valve is configured to move pistons 110 and 111 upward and downward by a balance between a pressure of operation air supplied from the operation port 104 to piston chambers 107 and 108 via a supply/exhaust passage 106
Implementation Method 2
The pilot valve is configured to move pistons 110 and 111 upward and downward by a balance between a pressure of operation air supplied from the operation port 104 to piston chambers 107 and 108 via a supply/exhaust passage 106 and an elastic force of a restoring spring 109
Data Source
AI summary
A combined valve includes a pilot mechanism and a manual mechanism. The manual mechanism includes: a flange formed with a communication passage; a housing including a holding hole formed in an axial direction for rotatably holding the manual mechanism and a storage opening part having a wider diameter than the holding hole and housing the flange in position; an operation port located in a position corresponding to the holding hole and internally holding a joint; and an exhaust port opening in an inner wall of the storage opening. The manual mechanism further includes a first sealing member forming a connecting passage to connect the operation port and the communication passage between the housing and the manual mechanism; and a second sealing member sealingly separating an opening portion of the exhaust port opening in the inner wall of the storage opening part from the connecting passage.