Common Line Temperature Measurement for Lithography Optical Systems
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Solution Overview
Problem
Current temperature measurement systems in lithography apparatuses, particularly in EUV and DUV systems, face challenges in achieving high precision due to the complexity of connecting resistors to switching units, leading to errors and increased component count.
Innovation Solution
A temperature measuring device that uses a common first line to connect multiple temperature resistors to a voltage recording unit, reducing the number of components and allowing for more precise temperature determination by including the voltage at the reference resistor in calculations, thereby simplifying the measurement process and enhancing precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple separate lines are used to connect each temperature resistor to the switching unit, then reliable individual connections are achieved, but the number of components and wiring complexity increases
Solution Approach 1:
The patent merges multiple separate connection lines into a single common line that connects multiple temperature resistors to the switching unit. This common line approach reduces the total number of wires and components while maintaining reliable electrical connections to all resistors, directly resolving the contradiction between connection reliability and wiring complexity
2Measurement precision
If multiple switching units are used to control connections to different resistors, then precise measurement control is achieved, but the number of components and potential error sources increase
Solution Approach 1:
The patent makes a single switching unit universal by enabling it to control connections to multiple different temperature resistors through the common line. This multi-functional switching unit reduces the total component count while maintaining precise measurement control, as one switching unit can sequentially or selectively connect to various resistors for measurement purposes
3Ease of manufacture
If voltage measurements are taken without including reference resistor voltage, then the measurement process is simpler, but measurement errors increase
Solution Approach 1:
The patent implements feedback by measuring the voltage at the reference temperature resistor and using this information to compensate for errors in the measurement resistor voltage measurements. The control unit processes both the reference voltage and measurement voltages together, allowing error correction and improved temperature determination accuracy while maintaining a relatively simple measurement process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables high-precision temperature measurements with an absolute precision of between 5 and 50 mK, reducing errors and component count, and is applicable to various parts of the lithography apparatus, including optical elements like mirrors and lenses.
Implementation Method 1
a plurality of temperature resistors (103, 123a-123o) comprising at least one reference temperature resistor (102) and at least one measurement temperature resistor (103), wherein the temperature resistors are in each case arranged between a first and a second line node
Implementation Method 2
a drive source (101) for generating a measurement current or a measurement voltage between a first and a second connection point of the drive source
Implementation Method 3
a voltage recording unit (105) for recording a voltage at the temperature resistors... a temperature determination unit suitable for being communicatively coupled to the voltage recording unit to receive the voltage recorded by the voltage recording unit and to determine the temperature
Data Source
AI summary
A temperature measuring device for measuring a temperature at or in an optical system of a lithography apparatus comprises: an activation source for generating a measurement current or a measurement voltage between a first and a second connection point of the activation source; a plurality of temperature resistors which comprise at a temperature resistor and a measurement temperature resistor, each temperature resistor between first and second line nodes; a first switching unit for selectively connecting the first connection point to a first line node; a voltage detection unit for detecting a voltage at the temperature resistors; a first line which electrically connects the second line node of the at least one reference temperature resistor and the second line node of the at least one measurement temperature resistor to a first connection point of the voltage detection unit; and a temperature determination unit.