Compact Actuator with Ball Screw and Wedge Mechanism
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Solution Overview
Problem
Conventional actuators with multiple degrees of freedom result in complex configurations and increased size, limiting design freedom in precision motion equipment, such as exposure apparatuses.
Innovation Solution
A compact actuator design with 2 degrees of freedom, utilizing a base member, ball screw, driving member, directional displacement members, and binding members, combined with a stage device providing 5 degrees of freedom, enables precise motion and posture control in multi-optical systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional actuators use drive devices equal in number to the desired degrees of freedom to achieve independent driving in all directions, then the actuator can be driven independently in all directions, but the configuration becomes more complex and the overall size increases
Solution Approach 1:
The patent combines multiple drive functions into a single actuator unit. The actuator integrates a drive device that can simultaneously control movement in multiple directions (X, Y, Z axes and rotational degrees) through a unified mechanical structure, eliminating the need for separate drive devices for each degree of freedom. This merging approach maintains full directional control while simplifying the overall configuration.
Solution Approach 2:
The actuator is designed as a universal drive unit capable of performing multiple functions simultaneously. A single actuator can generate linear motion in multiple directions and rotational motion through its integrated mechanical design, allowing one device to replace what would traditionally require multiple specialized drive devices.
2Adaptability or versatility
If conventional actuators use drive devices equal in number to the desired degrees of freedom, then independent driving in all directions is achieved, but the overall size increases
Solution Approach 1:
The patent merges multiple drive functions into a single compact actuator unit. By integrating the drive device with a mechanical structure that generates motion in multiple directions simultaneously, the overall volume is reduced compared to using separate drive devices for each degree of freedom.
Solution Approach 2:
The actuator employs a nested structural arrangement where components are arranged concentrically or in overlapping configurations. The drive device, mechanical structure, and control elements are integrated in a compact nested layout, minimizing the overall footprint while maintaining full functional capability for multi-directional independent driving.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compact actuator and stage device enhance precision and flexibility, allowing for reduced spatial constraints and improved performance in high-precision motion equipment, particularly in exposure apparatuses with multi-optical systems.
Implementation Method 1
a ball screw member including a ball screw coupled to the base member and a ball nut screwed onto the ball screw
Implementation Method 2
a wedge member coupled to the driving member so as to move in a second direction in response to a second movement of the driving member
Data Source
AI summary
An actuator according to example embodiments may be relatively compact and may be driven with 2 degrees of freedom with less spatial constraints. The actuator may include a base member, a ball screw member including a ball screw coupled to the base member and a ball nut screwed onto the ball screw, a driving member coupled to the ball nut so as to move in conjunction with the ball nut, a first directional displacement member configured to move in a first direction in response to a first movement of the driving member, a wedge member coupled to the driving member so as to be moved in a second direction in response to a second movement of the driving member, a second directional displacement member configured to move in a second direction in conjunction with the wedge member, and a binding member configured to bind the first directional displacement member to at least one of the driving member, the wedge member, and the base member.