Compact Box Reticle Opener With Edge-Grip Automation
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Solution Overview
Problem
The industry-standard compact box (CB) shipping containers for reticles lack automation features, making it difficult to automate the handling and processing of reticles, which are crucial for minimizing contamination in semiconductor fabrication.
Innovation Solution
A compact box opener system with a flowthrough deck, location guides, vacuum ports, a lid opening arm with a suction cup, rotary-actuated arms, and jaws with angular notches to grip the reticle's radiused edge, enabling automated or semi-automated opening and handling of reticles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual handling of reticles in compact boxes is used, then ease of operation is maintained, but contamination risk increases and automation capability is lost
Solution Approach 1:
The patent introduces a robotic work cell with specialized end effectors as an intermediary between the compact box and the reticle handling process. This mediator enables automated manipulation of reticles through the compact box opening mechanism without requiring direct manual contact, thus achieving automation while maintaining operational control through programmed sequences
Solution Approach 2:
The system segments the reticle handling process into distinct automated stages: compact box opening, reticle gripping at the radiused edge, reticle transfer, and placement. Each stage is performed by specialized robotic components, allowing the complex automated task to be broken down into manageable, controllable operations
2Productivity
If multiple separate transfers of reticles are used, then handling flexibility is improved, but productivity decreases and contamination risk increases
Solution Approach 1:
The patent merges the compact box opening function and the reticle gripping function into a single integrated robotic work cell operation. The end effector combines both the mechanism to open the compact box and the gripping mechanism to capture the reticle at its radiused edge, performing multiple functions in one automated sequence rather than requiring separate transfer operations
Solution Approach 2:
The robotic end effector is designed with multi-functionality to handle both the compact box opening task and the reticle gripping task. The same robotic system can adapt to different reticle sizes and box configurations through programmable control, reducing the need for specialized equipment for each handling operation
3Object-affected harmful factors
If automated gripping of reticles is implemented, then contamination is minimized, but device complexity increases
Solution Approach 1:
The patent applies local quality by designing the end effector to grip the reticle specifically at its radiused edge rather than contacting the entire reticle surface. This localized gripping approach minimizes the contact area between the automated system and the reticle, reducing the risk of particle transfer and contamination while maintaining secure handling
Solution Approach 2:
The system replaces manual mechanical handling with automated robotic manipulation. The robotic work cell uses precisely controlled mechanical movements and vacuum or magnetic fields to grip and transfer reticles, eliminating the need for human operators to physically handle the reticles, thereby minimizing contamination from manual contact
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates the safe and efficient automated handling of reticles by minimizing contact and contamination, allowing seamless integration with robotic work cells for reticle processing.
Implementation Method 1
a plurality of vacuum ports on the plurality of location guides capable of retaining the guides on the base
Implementation Method 2
a suction cup at an end thereof, wherein the suction cup is capable of gripping a lid of the compact box
Data Source
AI summary
An apparatus, system and method for a compact box opener suitable for opening a compact box containing therein a reticle. The embodiments provide: a flowthrough deck; a plurality of location guides on the flowthrough deck suitable to mate with guides on a base of the compact box; a plurality of vacuum ports on the plurality of location guides capable of retaining the guides on the base; a lid opening arm having a suction cup at an end thereof, wherein the suction cup is capable of gripping a lid of the compact box and opening the lid by an actuation of the lid opening arm; rotary-actuated arms that are raised for initial actuation within the drawer above a rim of the compact box and which, when actuated, rotate jaws at an end of each of the rotary-actuated arms inward over the rim and downward to a height below a lower plane of the reticle; and at least one angular notch in each of the jaws suitable to grip a radiused edge of the reticle. Once the radiused edge of the reticle is gripped by the inward movement of the jaws, the jaws are raised while the reticle remains gripped until the reticle is at a second height fully above the rim.