Remote-Controlled Fluid Valve Module for Compact Flow Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The increasing number of gas supply lines and fluid controllers in semiconductor manufacturing devices poses a challenge in ensuring sufficient installation space, particularly for pressure-type flow controllers with integrated upstream and downstream pressure sensors, which limits size reduction.
Innovation Solution
A fluid controller comprising a fluid control module with a flow channel, control valve, valve driver circuit, and first processor, paired with an external control module that processes signals directly to drive the valve, allowing for size reduction by separating the control logic and communication through high-speed digital cables and EtherCAT connectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a pressure-type flow controller with integrated upstream and downstream pressure sensors is used, then precise flow control is achieved, but the device size and thickness cannot be significantly reduced
Solution Approach 1:
The fluid controller is divided into two separate modules: a fluid control module containing the control valve and restriction part, and a control instrument containing the pressure sensors and control logic. This segmentation allows the fluid control module to be significantly reduced in size while the control instrument can be positioned remotely, resolving the contradiction between maintaining precise flow control and reducing device size.
Solution Approach 2:
A communication interface serves as an intermediary between the fluid control module and the control instrument, transmitting control signals and measurement data. This intermediary enables the separation of the control functions from the fluid handling components, allowing size reduction of the fluid control module while maintaining precise control capabilities through the remote control instrument.
2Adaptability or versatility
If the number of fluid controllers is increased to accommodate more gas supply lines, then fluid control capability is improved, but installation space becomes insufficient
Solution Approach 1:
By segmenting the fluid controller into a compact fluid control module and a separate control instrument, multiple fluid control modules can be installed in close proximity to the semiconductor manufacturing device without requiring proportionally more installation space. The control instruments can be consolidated or positioned remotely, enabling increased adaptability while constraining the total installation footprint.
3Length of stationary object
If internal elements are minimized for size reduction, then thickness is reduced, but space for control instrument becomes insufficient
Solution Approach 1:
The control instrument containing the pressure sensors and control logic is extracted from the fluid control module and positioned remotely. This extraction allows the fluid control module to be minimized in thickness while the control instrument occupies separate space, resolving the contradiction between reducing controller thickness and maintaining adequate space for control functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables a significantly reduced size and thickness of fluid controllers, ensuring safety and efficient control while allowing for installation in limited spaces near semiconductor manufacturing devices.
Implementation Method 1
a piezo actuator and a control valve driven by the piezo actuator
Data Source
AI summary
The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.