Compact Load Port Structure for Reduced Factory Interface Height
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Solution Overview
Problem
Current load ports in electronic device manufacturing systems consume excessive vertical space, limiting the integration of auxiliary components like substrate storage containers, metrology equipment, and air conditioning units, thereby increasing the overall footprint of the manufacturing system.
Innovation Solution
A compact load port design with an actuator mechanism that reduces the overall height of the load port, allowing it to be wall-mounted, thereby freeing up vertical space for auxiliary components and reducing the system's footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If traditional load port design is used, then substrate carrier receiving function is achieved, but vertical space consumption is excessive
Solution Approach 1:
The load port design transitions from a floor-standing configuration to a wall-mounted configuration, changing the spatial dimension from horizontal floor space to vertical wall space. This dimensional shift reduces the footprint on the factory floor while maintaining the load port's functional capabilities for receiving and sealing substrate carriers.
Solution Approach 2:
The load port incorporates a movable door mechanism actuated by an actuator that can open and close the transport opening dynamically. This dynamic capability allows the load port to maintain its compact wall-mounted form while still providing full access to substrate carriers when needed, resolving the contradiction between compact size and operational functionality.
2Length of stationary object
If load port height is reduced for compactness, then vertical space is freed for auxiliary components, but door sealing capability may be compromised
Solution Approach 1:
The design changes the geometric parameters of the load port, specifically reducing the overall height to less than 2.5 times the door height while maintaining adequate sealing capability. This parameter optimization allows compact installation while preserving the functional integrity of the transport opening seal.
Solution Approach 2:
The sealing function is concentrated in the local region of the door and its seal, rather than requiring the entire load port structure to be large. The door seal is designed to provide adequate sealing capability within the compact height constraint, allowing the rest of the load port structure to be minimized for space efficiency.
3Area of stationary object
If wall-mounted compact load port is used, then footprint is reduced, but integration complexity increases
Solution Approach 1:
The compact wall-mounted load port is designed to perform multiple functions: receiving substrate carriers, providing sealed transport access, and enabling wall-mounted installation. This multi-functionality allows a single compact component to replace what would traditionally require multiple separate components, reducing overall integration complexity despite the space constraints.
Data Source
AI summary
The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are capable of being transported between the substrate carrier and the factory interface. The load port can also include an actuator coupled to the frame, and a load port door coupled to the actuator and configured to seal the transport opening. The frame height can be greater than the height of the load port door, and less than 2.5 times the height of the load port door.