Compact Optical Microscope With Folded Wide-Field Imaging

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing optical microscopes struggle to provide a qualitatively acceptable wide field of view with a relatively short total track, and existing systems for wide-field imaging suffer from high distortion and field curvature.

Innovation Solution

An optical microscope design comprising a sequence of lenses with semi-reflective coatings, where light rays have a substantially orthogonal angle of incidence onto the second semi-reflective coating, achieving diffraction-limited performance over a wide field of view with low distortion and field curvature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a conventional optical microscope design is used, then the system can provide imaging function, but the total track length becomes too long and the field of view is limited

Engineering Contradiction:
Improvefield of viewVSAvoidtotal track length
Core Design Contradiction:
Area of stationary objectVSLength of stationary object

Solution Approach 1:

The patent introduces a folding optical path using a semi-reflective coating on a lens surface, effectively adding a dimensional element to the optical system. This allows the light path to fold back on itself, reducing the linear track length while maintaining the required optical path length for imaging. The semi-reflective coating acts as a beam splitter that redirects light at an angle, creating a compact folded configuration instead of a linear arrangement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested lens configuration where multiple lens elements are arranged in a compact sequence along the optical axis. The lenses are positioned closely together with optimized spacing, creating a nested arrangement that minimizes the overall track length while maintaining the required optical power and imaging performance across a wide field of view.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Area of stationary object

If individual microscope objective units are used for wide field of view, then the field of view increases, but the image quality deteriorates due to inability to provide acceptable quality over wide field

Engineering Contradiction:
Improvefield of viewVSAvoidimage quality
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent applies local quality by using aplanatic lens surfaces with specific curvature radii that are optimized for different regions of the optical field. The lens design incorporates varying curvature and refractive index distributions to correct for field curvature and distortion locally across the wide field of view, ensuring uniform high-quality imaging from center to edge.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs composite optical design by combining multiple lens elements with different refractive indices and dispersion properties. This composite lens system allows for correction of chromatic aberration and other optical imperfections across the wide field of view, maintaining high image quality throughout the entire field by compensating for local variations in optical performance.

Inventive Principle:
Principle #40Composite materials

3Area of stationary object

If existing wide-field imaging systems are used, then the field of view is wide, but distortion and field curvature increase significantly

Engineering Contradiction:
Improvefield of viewVSAvoiddistortion and field curvature
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent uses aplanatic lens surfaces with specifically calculated curvature radii to locally correct field curvature and distortion. The lens design incorporates surface profiles that vary across the aperture to compensate for off-axis aberrations, maintaining flat field and low distortion across the entire wide field of view through localized optical correction.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent optimizes key optical parameters including lens curvature radii, thicknesses, and spacing to minimize distortion and field curvature. By carefully adjusting these parameters in the lens design equations, the system achieves a flat image plane and low distortion across the wide field of view while maintaining compact track length.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves diffraction-limited performance over a full field of view with low distortion and flattened image plane, maintaining a compact system configuration.

Implementation Method 1

a first lens having a first lens surface at the side of the object plane and a second lens surface at a side of the image plane, the first lens surface having a first semi-reflective coating

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a third lens having a fifth lens surface at the side of the object plane and a sixth lens surface at a side of the image plane, the sixth lens surface having a second semi-reflective coating

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 3

An optical microscope design comprising a sequence of lenses with semi-reflective coatings, where light rays have a substantially orthogonal angle of incidence onto the second semi-reflective coating, achieving diffraction-limited performance over a wide field of view

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS12529876B2Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device
Publication Date: 2026.01.20 NEARFIELD INSTR BV
  • US12529876B2 patent drawing
  • US12529876B2 patent drawing
  • US12529876B2 patent drawing

AI summary

An optical microscope (1) is provided herewith that is configured to provide an image in an image plane (3) of an object in an object plane (5). The optical microscope comprises in an order along an optical axis (6) from the object plane to the image plane, a first lens (7), a second lens (11) and a third lens (14). The first lens (7) has a first lens surface (8) at the side of the object plane and a second lens surface (9) at a side of the image plane, the first lens surface having a first semi-reflective coating (10). The second lens (11) has a third lens surface (12) at the side of the object plane and a fourth lens surface (13) at a side of the image plane. The third lens (14) has a fifth lens surface (15) at the side of the object plane and a sixth lens surface (16) at a side of the image plane, the sixth lens surface having a second semi-reflective coating (17).The optical microscope is compact and provides for a diffraction-limited performance (MTF) over the full field of view with low distortion and low field curvature.