Compact Projection Exposure Device Using Dyson Optics
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Solution Overview
Problem
Existing projection exposure devices for film-shaped tapes require large installation spaces, are prone to airflow obstruction in clean rooms, and struggle to maintain precise contact with warped tapes during the exposure process, leading to potential errors in circuit pattern transfer.
Innovation Solution
A compact projection exposure device utilizing Dyson optics with a vertical transfer mechanism and suction systems to ensure precise alignment and contact with the tape, featuring a controller for adjusting the exposure stage and mask positions based on real-time measurements, and a blower to enhance airflow and minimize space usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional projection exposure device is used, then circuit patterns can be transferred to the film-shaped tape, but the device occupies large installation space in the clean room
Solution Approach 1:
The patent reorients the optical axis of the projection exposure device from a horizontal configuration to a vertical configuration. This dimensional change allows the device to be stacked vertically rather than extending horizontally, dramatically reducing the floor space required for installation while maintaining the same exposure functionality and precision
2Device complexity
If the optical axis is positioned horizontally, then the projection system can be simplified, but airflow in the clean room is obstructed
Solution Approach 1:
By changing the optical axis from horizontal to vertical orientation, the device allows clean room airflow to pass horizontally underneath and around the compact vertical structure, eliminating the airflow obstruction problem while maintaining projection system functionality
3Ease of operation
If the tape is fed horizontally through the exposure section, then the transfer mechanism is simplified, but precise contact with warped tapes cannot be maintained
Solution Approach 1:
The patent changes the tape feeding direction from horizontal to vertical, allowing the tape to be fed upward through the exposure section. This vertical orientation, combined with a suction mechanism positioned at the exposure stage, enables precise contact with the tape surface even when warped, as the suction force acts perpendicular to the tape surface to maintain consistent exposure contact
4Productivity
If a large exposure device is installed, then exposure functionality is ensured, but the clean room working area is reduced
Solution Approach 1:
The vertical orientation of the optical axis and exposure stage creates a compact footprint that minimizes the horizontal working area occupied by the device, while the exposure capability is maintained through the vertical stacking of optical components and the upward tape feeding path
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves high precision in circuit pattern transfer without occupying large clean room space, maintains surface contact with warped tapes, and improves airflow, ensuring efficient and accurate exposure processes.
Implementation Method 1
projecting the image of a reticle (mask) to a surface of a board, and to transfer this image to the surface
Implementation Method 2
a first suction mechanism for drawing a center region of the tape to the exposure stage; a second suction mechanism for drawing side regions of the tape to the exposure stage
Data Source
AI summary
The present invention relates to provide a projection exposure device having a small volume, thereby not occupying a large installation space. The projection exposure device is configured to transfer patterns formed on a mask to a surface of film-shaped tape on an upright exposure stage by projecting the patterns onto the surface using light. This projection exposure device includes a transfer mechanism for feeding the tape to the exposure stage vertically, and a projection optical mechanism for irradiating the surface of the tape with the light. The projection optical mechanism is composed of Dyson optics located opposite the transfer mechanism across the exposure stage, and has an optical axis that is substantially perpendicular to the exposure stage.