Compact Valve Manifold Assembly for Independent Control With Fewer Leak Points
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Solution Overview
Problem
Existing multiple valve assemblies in fluid systems, such as gas distribution systems for semiconductor wafer manufacturing, require complex and bulky configurations with numerous fluid connections, leading to increased size and potential leak points, which complicates assembly and maintenance.
Innovation Solution
A compact actuated manifold assembly that integrates multiple valve subassemblies and actuators within a single housing block, featuring a unitary actuator housing with internal passages for actuating fluid supply, reducing the need for additional fluid passages and seals, and allowing for independent actuation of valve elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple valve assemblies are arranged in separate manifold valve blocks, then each valve can be independently controlled, but the assembly size and number of fluid connections increase
Solution Approach 1:
The patent combines multiple valve assemblies into a single integrated manifold body, where multiple valve elements are housed within one consolidated structure. This merging approach maintains independent control capability while significantly reducing the overall assembly size and number of separate components compared to using multiple separate manifold blocks.
Solution Approach 2:
The manifold body serves multiple functions simultaneously: it houses multiple valve elements, provides fluid distribution pathways, and integrates actuator mounting surfaces. This multi-functionality allows the single component to replace what would traditionally require multiple separate components, reducing assembly size while maintaining full valve control capability.
2Adaptability or versatility
If multiple valve assemblies are arranged in separate manifold valve blocks, then each valve can be independently controlled, but the number of fluid connections and potential leak points increases
Solution Approach 1:
By consolidating multiple valve assemblies into one integrated manifold body, the patent reduces the number of external fluid connections required. Fewer connections mean fewer potential leak points, thereby improving system reliability while maintaining independent valve control through internal fluid distribution pathways.
Solution Approach 2:
The patent extracts and eliminates unnecessary external connections by integrating fluid distribution pathways directly within the manifold body. This extraction of fluid paths from external connections to internal passages reduces the number of potential leak points while preserving independent valve control functionality.
3Adaptability or versatility
If complex configurations with numerous fluid connections are used, then multiple valve functions can be achieved, but assembly and maintenance complexity increases
Solution Approach 1:
The patent merges multiple valve functions into a single integrated manifold body with internal fluid distribution pathways. This consolidation achieves multiple valve functions while simplifying assembly, as the integrated structure requires fewer separate components and connections compared to complex configurations with numerous external fluid paths.
Solution Approach 2:
The patent transitions from external three-dimensional arrangements of multiple manifold blocks to a compact internal two-dimensional fluid distribution scheme within the manifold body. This dimensional reorganization maintains multiple valve functions while reducing overall assembly complexity and external connections.
Data Source
AI summary
A manifold body includes a body block, with one or more end connections each extending laterally outward from a first surface of the body block, one or more lower valve cavities each recessed laterally inward from the first surface, one or more upper valve cavities each recessed laterally inward from the first surface and connected with a corresponding one of the one or more lower valve cavities by a vertically extending second passage, one or more lower end ports each extending laterally outward from a second surface of the body block and connected with a corresponding one of the one or more lower valve cavities by a laterally extending third passage, and one or more upper end ports each extending laterally outward from the second surface and connected with a corresponding one of the one or more upper valve cavities by a laterally extending fourth passage.