Compact Waste Liquid Treating Apparatus with Nested Tanks
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Solution Overview
Problem
Existing waste liquid treating apparatuses for semiconductor and optical device manufacturing require large installations, making them inefficient for use in clean rooms with high maintenance costs due to their non-compact design.
Innovation Solution
A compact processing waste liquid treating apparatus with a modular design, including a waste liquid tank, filtering system, pure water generation, and temperature adjustment, all housed within a compact framework that allows for easy replacement of filters and ion exchange resins, enabling efficient operation and maintenance without sacrificing operator usability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional waste liquid treating apparatus are used, then waste liquid can be purified, but the installation area becomes excessively large
Solution Approach 1:
The patent implements nesting by placing the waste liquid storage tank inside the clear water storage tank, and the pure water storage tank inside the clear water storage tank. This concentric arrangement allows multiple storage functions to occupy the same spatial footprint, dramatically reducing the installation area while maintaining all necessary purification and storage capabilities.
Solution Approach 2:
The patent transitions from a horizontal spread-out layout to a vertical stacked arrangement. By utilizing the vertical dimension for stacking storage tanks and positioning components at different heights, the system achieves compact footprint while preserving all purification functions. The control unit and other components are arranged vertically to maximize space utilization.
2Area of stationary object
If compact design is implemented, then installation area is reduced, but operator usability may be compromised
Solution Approach 1:
The patent introduces a control unit as an intermediary that mediates between the compact physical structure and the operator. This control unit provides a user-friendly interface for monitoring and controlling the purification process, allowing operators to interact with the compact system easily without needing direct access to internal components. The control unit handles complex operations automatically, maintaining ease of use despite the compact design.
3Area of stationary object
If all components are integrated in compact housing, then space is saved, but maintenance access becomes difficult
Solution Approach 1:
The patent applies segmentation by dividing the compact system into distinct modular components: waste liquid storage tank, clear water storage tank, pure water storage tank, filtering means, and control unit. Each component can be independently accessed, removed, and maintained. The detachable nature of these components allows maintenance personnel to service individual parts without disassembling the entire compact structure, facilitating easy maintenance despite the integrated design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compact design allows for effective utilization of clean rooms with reduced maintenance costs while maintaining operator efficiency, facilitating the reuse and recycling of processing waste liquids.
Implementation Method 1
waste liquid filtering means including a filter for filtering and purifying the processing waste liquid supplied by the waste liquid supply pump into clear water
Implementation Method 2
pure water generating means including ion exchange means for purifying the clear water supplied by the clear water supply pump into pure water
Data Source
AI summary
In a processing waste liquid treating apparatus, a housing includes a bottom wall, an upper wall, a left lateral wall, a rear wall and an opening/closing door for opening/closing a front opening. A waste liquid tank is disposed on the bottom wall and close to the rear wall. A clear water storage tank is disposed adjacently to the waste liquid tank and at the central portion of the bottom wall. A pure water generating unit is disposed on the bottom wall adjacently to the clear water storage tank and close to the front opening. A waste liquid filtering unit is disposed above the pure water generating unit. A pure water temperature adjusting unit is disposed above the waste liquid tank. A control unit and a console panel are disposed above the waste liquid filtering unit and the console panel is disposed on the front side of the housing.