Compact Wet Scrubber with Integrated Bypass Channel

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Solution Overview

Problem

Existing wet scrubbers for gas stream cleaning in the semiconductor industry face challenges due to their large physical dimensions, making them difficult to transport and install, and require additional space and time for installation, especially with external bypass lines.

Innovation Solution

A compact wet scrubber design with an integrated bypass channel and regulator within the housing, featuring two washing segments and a fan system that allows for efficient air pressure regulation and reduced footprint, eliminating the need for external structures and simplifying installation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional wet scrubbers are used for gas stream cleaning, then effective gas cleaning capabilities are achieved, but large physical dimensions and installation space requirements result

Engineering Contradiction:

Improvegas cleaning effectivenessVSAvoidinstallation space

Core Design Contradiction:

ReliabilityVSArea of stationary object

Solution Approach 1:

The bypass channel is integrated within the housing of the wet scrubber, merging two previously separate functional paths (cleaning path and bypass path) into a single compact structure. This eliminates the need for external bypass lines and reduces the overall installation footprint while maintaining both cleaning effectiveness and bypass functionality.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The bypass channel is nested within the housing structure, utilizing the internal volume of the existing housing to accommodate the bypass path. This nesting approach allows the bypass functionality to be embedded without increasing the external dimensions of the device, effectively hiding the bypass infrastructure within the main body.

Inventive Principle:

Principle #7Nested doll (Nesting)

2Reliability

If traditional wet scrubbers with external bypass lines are used, then gas stream cleaning is effective, but installation time and complexity increase

Engineering Contradiction:

Improvegas cleaning effectivenessVSAvoidinstallation time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

By combining the bypass channel and washing segments into a single integrated housing, the number of separate components to be installed is reduced. The bypass channel is pre-integrated within the housing structure, eliminating the need for separate external bypass line installation and reducing overall installation time and complexity.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If traditional wet scrubbers are used, then gas cleaning functionality is provided, but device complexity and footprint increase

Engineering Contradiction:

Improvegas cleaning functionalityVSAvoidstructural complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The bypass channel and washing segments are merged into a single integrated housing structure, reducing the number of separate components and connections required. This integration simplifies the overall device architecture while maintaining both bypass functionality and gas cleaning capabilities, thereby reducing structural complexity.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The compact design reduces the overall height and installation space requirements, allowing for faster and more efficient installation while maintaining effective gas cleaning capabilities, with the ability to manage pressure fluctuations and separate liquid from the gas stream effectively.

Implementation Method 1

at least one fan (6) that serves to regulate the air pressure along the flow path of the gas stream

Methodology Applied

Scientific EffectPressure regulation: Pressure Gradient

Implementation Method 2

Acidic and alkaline gases can be reduced to low levels by means of chemical absorption with alkaline or acidic washing liquids

Methodology Applied

Scientific EffectChemical absorption: Absorption (physical)

Implementation Method 3

the gas to be cleaned is brought into contact with finely dispersed water drops or with some other washing liquid in a parallel current or in a counter-current, thereby cleaning the laden gas stream

Methodology Applied

Scientific EffectPhase separation: Two-Phase Flow

Data Source

PatentUS11504670B2Apparatus and method for wet cleaning a gas stream

Publication Date: 2022.11.22 DAS ENVIRONMENTAL EXPERT

AI summary

An apparatus and method for wet cleaning a gas stream has a housing with a gas inlet and a gas outlet, wherein, in the housing, there is at least a first washing segment that serves to clean the gas stream with a washing liquid and that is arranged in the flow path of the gas stream. Inside the housing of the apparatus, there is at least one fan that regulates air pressure along the flow path of the gas stream. A bypass channel for bypassing the flow path through the at least one washing segment as well as a regulator that is arranged in the bypass and that serves to discharge the gas stream being conveyed via the bypass channel are arranged inside the housing.