Compact Z-Scanner for High-Speed SPM Imaging

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Solution Overview

Problem

Conventional scanning probe microscopes (SPMs) face limitations in scanning speed due to large, massive scanner and probe holder designs, which compromise resonant frequency and make them unwieldy and difficult to use, while also restricting the ability to image larger samples at high resolution and faster rates.

Innovation Solution

A compact, lightweight Z-scanner assembly with a taper mount is developed, allowing for rigid coupling to the AFM head and incorporating a compact probe holder design that enhances resonant frequency, enabling faster scanning speeds and easier probe exchange by being readily removable.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a large, massive scanner and probe holder design is used, then structural stability is improved, but scanning speed deteriorates due to compromised resonant frequency

Engineering Contradiction:
Improvestructural stabilityVSAvoidscanning speed
Core Design Contradiction:
Stability of the object's compositionVSSpeed

Solution Approach 1:

The scanner is divided into separate functional modules: an XY scanner for horizontal positioning and a Z-scanner for vertical positioning. This segmentation allows each module to be optimized independently, with the Z-scanner being compact and lightweight to maintain high resonant frequency for fast scanning, while the XY scanner provides stable horizontal positioning.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent separates the scanning functions into different spatial dimensions and operational regimes. The XY scanner operates at lower frequencies for stable horizontal positioning, while the Z-scanner operates at high frequencies (>50 kHz) for fast vertical scanning. This dimensional separation resolves the contradiction by allowing each axis to be optimized for its specific function without compromising the other.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Speed

If a compact, lightweight Z-scanner design is used, then scanning speed is improved through high resonant frequency, but ease of operation deteriorates due to removability requirements

Engineering Contradiction:
Improvescanning speedVSAvoidease of use
Core Design Contradiction:
SpeedVSEase of operation

Solution Approach 1:

The Z-scanner is designed as a removable module that can be dynamically attached and detached from the AFM head. This dynamic design allows the compact scanner to be easily installed or removed for probe exchanges without requiring complex tools or procedures, thereby maintaining ease of operation despite the lightweight construction.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The removable Z-scanner design provides multi-functionality: it serves as both a high-speed scanning component and an easily replaceable module. The universal mounting interface allows the same compact scanner to be quickly installed and removed, combining high-speed performance with operational flexibility and ease of use.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Speed

If a compact probe holder design is used, then resonant frequency is enhanced for faster scanning, but device complexity increases due to rigid coupling requirements

Engineering Contradiction:
Improvescanning speedVSAvoiddevice complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The probe holder is rigidly coupled to and essentially becomes an integrated part of the Z-scanner body. This merging eliminates the need for separate mounting mechanisms and flexible couplings, reducing device complexity while maintaining the compact design for high resonant frequency. The rigid coupling ensures stable probe positioning during high-speed scanning.

Inventive Principle:
Principle #5Merging (Combining)

4Ease of operation

If the Z-scanner is made readily removable, then ease of operation is improved for probe exchange, but reliability deteriorates due to coupling stability

Engineering Contradiction:
Improveease of useVSAvoidcoupling stability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The coupling mechanism is designed to be dynamically stable when attached, providing rigid and reliable connection during scanning operations. The tapered mount with vacuum coupling ensures that once attached, the Z-scanner remains firmly fixed to the AFM head, maintaining coupling stability and reliability throughout high-speed scanning while still allowing easy removal when needed.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves scan speeds significantly greater than conventional SPMs, maintaining high resonant frequencies and facilitating easy use, with the Z-scanner being capable of scanning at over 50 kilohertz, improving both speed and usability.

Implementation Method 1

the actuator is a piezoelectric device that transforms electrical energy to mechanical energy

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the sensor directly measures motion of the probe device in the Z-direction

Methodology Applied
Scientific EffectPiezoelectric effect: Converse Piezoelectric Effect

Data Source

PatentEP2702416B1Compact scanner for scanning probe microscope
Publication Date: 2019.11.20 BRUKER NANO INC
  • EP2702416B1 patent drawingFigure 1~2
  • EP2702416B1 patent drawingFigure 3~4
  • EP2702416B1 patent drawingFigure 5

AI summary

A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.