Compartmentalized Imaging Unit for Low-Reflection Substrate Inspection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing systems face challenges with lighting reflection and contamination of sensors and lightings due to fumes, making maintenance difficult and unsafe, and require improved inspection methods for substrates, nozzles, and treatment liquids.
Innovation Solution
A substrate processing apparatus with a compartmentalized photographing unit that includes a lighting assembly emitting light in a downwardly inclined direction, divided into groups to minimize reflection, and a controller for different inspection modes, allowing separate maintenance and improved image acquisition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensors and lighting are installed in the process chamber to monitor substrate and treatment liquid, then inspection capability is improved, but sensors and lighting are contaminated by fumes requiring maintenance
Solution Approach 1:
The photographing unit is divided into a container portion that can be separated from the process chamber. The container houses the sensor and lighting, allowing it to be detached for maintenance while the process chamber remains operational. This segmentation enables independent maintenance of the photographing unit without requiring worker entry into the contaminated process chamber.
Solution Approach 2:
The container acts as an intermediary structure that houses the photographing components away from direct exposure to fumes in the process chamber. The container can be opened or removed to provide access for maintenance, serving as a protective barrier and access interface between the clean photographing components and the contaminated processing environment.
2Measurement precision
If multiple sensors and lighting are installed at different locations, then inspection coverage is improved, but maintenance time increases
Solution Approach 1:
Multiple photographing components (sensors and lighting units) are integrated into a single container structure. This allows all components to be maintained as one unified unit rather than individually, significantly reducing maintenance time while maintaining comprehensive inspection coverage across multiple locations in the process chamber.
3Measurement precision
If lighting is installed to illuminate substrate for inspection, then image quality is improved, but lighting reflection occurs on substrate surface
Solution Approach 1:
The lighting unit is positioned asymmetrically within the container at a specific angle relative to the substrate. This asymmetric positioning causes light to illuminate the substrate at an oblique angle rather than perpendicularly, reducing direct reflection into the sensor while maintaining sufficient illumination for high-quality imaging.
Solution Approach 2:
The container is positioned at a height and angle above the substrate, creating a three-dimensional spatial arrangement where the lighting and sensor view the substrate from an elevated perspective. This dimensional positioning allows optimal illumination angles that minimize reflection while maintaining comprehensive coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively inspects substrate, nozzle, and treatment liquid states while reducing maintenance time and minimizing lighting reflection, enhancing safety and efficiency.
Implementation Method 1
the top surface of the substrate may be flat overall. Accordingly, the light irradiated by the lighting may be reflected from the top surface of the substrate. In other words, lighting reflection may occur from the top surface of the substrate.
Data Source
AI summary
Disclosed is an apparatus for processing a substrate, the apparatus including: a housing providing a processing space; a support unit for supporting a substrate in the processing space; and a photographing unit for photographing the processing space, in which the photographing unit includes: a container mounted on one upper side of the housing, and providing an interior space compartmentalized with the processing space; and a vision provided in the interior space of the container, and photographing the processing space in a downwardly inclined direction.