Compliant Robot Blade Pads for Substrate Transfer
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Solution Overview
Problem
Current substrate transfer robot blades with non-compliant support surfaces cause defects in semiconductor substrates due to excessive force during acceleration, as they do not effectively manage the change in velocity and resulting acceleration during transfer processes.
Innovation Solution
The use of compliant pads with resilient elements and materials, such as polyimide-based plastics, ceramic materials, and metal composites, supported by a substrate transfer robot blade to distribute and absorb the force, allowing for a longer velocity change period and reducing acceleration and force on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If non-compliant (rigid) substrate support surfaces are used, then the substrate is firmly supported during transfer, but excessive force is exerted on the substrate during acceleration causing defects
Solution Approach 1:
The patent changes the physical parameter of the support surface from rigid to compliant by using elastomeric material with specific durometer values (20-80 Shore A). This compliance allows the support surface to deform and extend the acceleration time, reducing the force exerted on the substrate during velocity changes while maintaining adequate support firmness.
Solution Approach 2:
The compliant pad material acts as a cushioning element that absorbs and distributes the acceleration forces before they reach the substrate. The elastomeric material deforms during acceleration, extending the time period over which velocity changes occur, thereby reducing the peak force on the substrate and preventing defects.
2Object-affected harmful factors
If compliant pads are used to reduce acceleration force, then substrate defects are reduced, but the device complexity increases
Solution Approach 1:
The patent uses a thin compliant pad made of elastomeric material that is bonded to the blade body. This flexible element provides the necessary compliance to reduce acceleration forces while maintaining a simple overall blade structure. The pad can be easily replaced when worn, keeping maintenance simple despite the added compliance feature.
Solution Approach 2:
The blade assembly becomes a composite structure combining the rigid blade body (providing structural support) with the compliant elastomeric pad (providing force distribution). This composite approach allows each material to perform its optimal function while keeping the overall design relatively simple and effective.
3Force
If compliant pads are used to extend velocity change period, then acceleration force is reduced, but the transfer time increases
Solution Approach 1:
The compliant pad changes the time parameter of the acceleration process by extending the duration over which velocity changes occur. While this does increase the transfer time slightly, it significantly reduces the peak acceleration force on the substrate. The elastomeric material's deformation characteristics are optimized to provide this time extension without excessive delay.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compliant pads reduce substrate defects by decreasing the acceleration and force exerted during transfer, enabling safer and more efficient handling of substrates while allowing for quick replacement of pads to adapt to different processes, thus minimizing downtime.
Implementation Method 1
a plurality of compliant pads each comprising a contact surface and an opposite bottom surface supported by the body and arranged to support a substrate when disposed on the robot blade
Data Source
AI summary
Substrate transfer robot blades used to engage and support a substrate during transfer include a blade body having a blade support surface and at least one pad having a top surface and an opposite bottom surface, a central opening extending from the top surface to the bottom surface, and a resilient portion formed from the at least one pad. The resilient portion formed from the at least one pad extends from and cantilevers from a side surface of the central opening of the at least one pad that is disposed directly on the side surface at the end of a long axis of the resilient portion. The resilient portion further includes a curved substrate contact surface on an outermost end of the resilient portion on which a substrate is supported when disposed on the substrate transfer robot blade.