Component Transfer Temperature Control to Reduce Thermal Drift
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Solution Overview
Problem
Temperature control of sensitive components during transfer between systems is challenging due to thermal loads and drifts, leading to measurement inaccuracies in microlithography processes, where maintaining a few millikelvin stability is essential but difficult to achieve.
Innovation Solution
A method that involves ascertaining expected temperature drifts and modifying the temperature in one or both systems by adjusting temperature regulation and thermal loads to minimize temperature changes during transfer, using sensors and predictive models to compensate for thermal influences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the replacement component is transferred from a separate holder into the measurement system, then the component can be exchanged for measurement, but temperature drift occurs during transfer leading to measurement errors
Solution Approach 1:
The patent applies preliminary action by pre-heating or pre-cooling the replacement component in the holder to match the target temperature of the measurement system before transfer. This advance temperature adjustment prevents thermal shock and drift during the transfer process, ensuring the component reaches the measurement system at the correct temperature, thereby maintaining measurement precision while enabling component exchange.
2Adaptability or versatility
If the component is held in a separate holder with multiple replacement components, then component replacement is enabled, but thermal loads from the holder and transfer mechanism cause temperature instability
Solution Approach 1:
The patent introduces an intermediary thermal management system between the holder and the measurement system. This includes thermal isolation barriers, active temperature control mechanisms in the holder, and controlled transfer pathways that minimize thermal exchange during component transfer. The intermediary systems buffer the thermal loads from both the holder and transfer mechanism, maintaining temperature stability of the replacement component while enabling ready availability for replacement.
3Extent of automation
If motors and transfer mechanisms are used to move the replacement component, then automated transfer is achieved, but thermal loads from these mechanisms cause heating and cooling of the component
Solution Approach 1:
The patent extracts the thermal influence of the transfer mechanism from the component transfer process. This is achieved by using thermally isolated transfer mechanisms, such as magnetic levitation or contactless transfer fields, that eliminate direct thermal contact between the motor-driven transfer mechanism and the replacement component. Alternatively, the transfer mechanism is thermally decoupled through insulation barriers, allowing automated transfer while preventing thermal loads from affecting the component's temperature.
4Productivity
If the component is exposed to thermal loads during transfer, then the transfer process can proceed, but the optical properties of the component change due to thermal expansion and refractive index variations
Solution Approach 1:
The patent applies preliminary anti-action by implementing compensatory thermal management measures before and during the transfer process. This includes pre-adjusting the temperature of the component to anticipate thermal loads during transfer, using active thermal control systems that counteract expected temperature changes, and designing transfer pathways that minimize exposure to thermal gradients. These preliminary counter-measures prevent thermal expansion and refractive index variations, maintaining optical property stability while enabling efficient transfer.
Data Source
AI summary
A method for temperature control of a component that is transferable between a first system and a second system includes: ascertaining a temperature drift of a temperature of the component that is to be expected after transfer of the component from the first system into the second system; and modifying a temperature prevailing in the first system and/or a temperature prevailing in the second system such that the temperature drift that is actually occurring after transfer of the component from the first system into the second system is reduced with respect to the expected temperature drift.