Composite Base Support with Anisotropic Thermal Conductivity
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Solution Overview
Problem
In semiconductor processing, existing heater systems face challenges in maintaining uniform temperature profiles, leading to processing variations and inefficiencies, particularly in compensating for heat loss and variations during plasma enhanced film deposition or etch processes.
Innovation Solution
A composite base support with thermally conductive arcuate members embedded in a matrix material, providing anisotropic thermal conductivity in radial, azimuthal, and axial directions, enhances temperature uniformity by configuring graphite fibers in concentric arrangements within a polyimide matrix, allowing for variable geometry and material composition to optimize heat distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional heater systems are used with isotropic thermal conductivity, then the structure is simple and easy to manufacture, but the temperature uniformity across the substrate is poor leading to processing variations
Solution Approach 1:
The base support is constructed as a composite material consisting of a matrix material (such as ceramic or metal) with embedded thermally conductive members (such as graphite fibers or metal particles). This composite structure enables anisotropic thermal conductivity where the thermal conductivity in the azimuthal direction (K_phi) is greater than in the radial (K_rho) or axial (K_z) directions, thereby improving temperature uniformity across the substrate while managing the increased structural complexity through systematic material design
Solution Approach 2:
The thermally conductive members are arranged in specific patterns or orientations within the base support to create direction-dependent thermal properties. By concentrating thermal conductivity in the azimuthal direction where temperature uniformity is most needed, the design applies local quality enhancement precisely where required, improving temperature distribution without uniformly increasing complexity throughout the entire heater structure
2Temperature
If the thermal conductivity in radial and axial directions is increased, then heat distribution improves, but the azimuthal temperature uniformity cannot be optimized independently
Solution Approach 1:
The composite material design with embedded thermally conductive members enables independent control of thermal conductivity in different directions. By adjusting the orientation, concentration, and arrangement of conductive members within the matrix, the system achieves high azimuthal thermal conductivity for temperature uniformity while maintaining appropriate radial and axial conductivity levels, providing flexible thermal management adapted to specific processing requirements
Solution Approach 2:
The invention changes the thermal conductivity parameters of the base support by incorporating materials with different thermal properties and arranging them in specific configurations. The thermal conductivity tensor is modified such that K_phi > K_rho and/or K_phi > K_z, allowing independent optimization of heat distribution characteristics in different spatial directions to achieve superior azimuthal temperature uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The anisotropic thermal conductivity configuration significantly improves azimuthal temperature uniformity while maintaining radial and axial temperature profiles, reducing processing variations and enhancing efficiency in semiconductor processing applications.
Implementation Method 1
Each of the plurality thermally conductive arcuate members are arranged concentrically and define predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions
Implementation Method 2
the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions... the thermal conductivity in the azimuthal direction is higher than the radial or axial directions
Data Source
Figure 1~2A
Figure 2B~2D
Figure 3~4
AI summary
An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate and method of making the same is provided. The apparatus includes a base support having a surface adapted to support the substrate and a heater for heating the substrate with the heater being disposed proximate the base support. The base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, each of the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (p), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support.