Composite Carrier for Flexible Substrate TFT Fabrication

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Solution Overview

Problem

Current methods for forming thin-film transistor (TFT) devices on flexible substrates face challenges such as thermal expansion mismatch, chemical incompatibility, and alignment difficulties, limiting the use of flexible substrates like plastics and metals due to the need for rigid carriers like glass, which impose constraints on substrate material selection and fabrication processes.

Innovation Solution

A composite carrier material is developed, comprising a plastic binder and embedded materials with adjustable coefficient of thermal expansion (CTE) characteristics, allowing flexible substrates like metals and plastics to be processed at high temperatures without dimensional instability, using a composite carrier that matches the CTE of the substrate for stable fabrication.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a rigid substrate like glass or silicon is used for TFT fabrication, then thermal stability and fabrication compatibility are improved, but flexibility and weight are worsened

Engineering Contradiction:
Improvethermal stabilityVSAvoidflexibility
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The invention separates the TFT fabrication process into two distinct stages: first fabricating the TFT on a rigid carrier substrate that provides thermal stability during high-temperature processing, then transferring the completed TFT to a flexible substrate that provides the desired flexibility. This segmentation allows each substrate to fulfill its optimal function without compromise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The rigid carrier substrate serves as an intermediary during the fabrication process, providing the necessary thermal stability for TFT formation. After the TFT is fabricated on the carrier, the carrier acts as a temporary support that enables subsequent transfer to the flexible substrate, mediating between the conflicting requirements of thermal stability and flexibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If metal foil substrates are used for TFT fabrication, then flexibility is improved, but chemical incompatibility and thermal expansion mismatch are worsened

Engineering Contradiction:
ImproveflexibilityVSAvoidchemical compatibility
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The invention separates the flexibility function from the fabrication compatibility function by using two different substrates: the rigid carrier substrate handles the fabrication compatibility requirements during high-temperature processing, while the flexible substrate handles the flexibility requirements after TFT formation. This eliminates the chemical incompatibility issues that would arise from using metal foil during fabrication.

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If plastic substrates with low glass transition temperature are used, then flexibility and weight are improved, but high-temperature processing capability is worsened

Engineering Contradiction:
ImproveflexibilityVSAvoidprocessing temperature tolerance
Core Design Contradiction:
Adaptability or versatilityVSTemperature

Solution Approach 1:

The invention divides the process into high-temperature TFT fabrication on a rigid carrier substrate followed by transfer to a low-temperature flexible plastic substrate. The plastic substrate is only exposed to low temperatures after the TFT is already formed on the carrier, allowing the use of flexible plastics with low glass transition temperatures without compromising the high-temperature fabrication process.

Inventive Principle:
Principle #1Segmentation

4Object-affected harmful factors

If additional barrier layers and protective coatings are added to protect plastic substrates, then substrate protection is improved, but device complexity and fabrication steps are worsened

Engineering Contradiction:
Improvesubstrate protectionVSAvoidfabrication steps
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The invention separates the protection requirements from the flexibility requirements by using a rigid carrier substrate during fabrication that inherently provides protection, then transferring the TFT to the flexible substrate afterward. This eliminates the need for multiple barrier layers on the flexible substrate, as the carrier provides protection during the critical fabrication stages.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the use of a wide range of flexible substrates for TFT fabrication, providing dimensional stability and reducing thermal expansion issues, allowing for high-temperature processing without adverse effects, and simplifying the fabrication process by eliminating the need for additional adhesive layers.

Implementation Method 1

A composite carrier material is developed, comprising a plastic binder and embedded materials with adjustable coefficient of thermal expansion (CTE) characteristics, allowing flexible substrates like metals and plastics to be processed at high temperatures without dimensional instability

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS9627420B2Method for forming an electronic device on a flexible substrate supported by a detachable carrier
Publication Date: 2017.04.18 CARESTREAM HEALTH INC
  • US9627420B2 patent drawing
  • US9627420B2 patent drawing
  • US9627420B2 patent drawing

AI summary

A method for forming an electronic device provides a carrier formed from a composite material comprising a plastic binder and an embedded material. A substrate material is attached to the carrier. The substrate is processed to form the electronic device thereon. The substrate is then detached from the carrier to yield the resultant electronic device.