Composite Deposition Mask Membrane for High-Resolution OLEDOS
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Solution Overview
Problem
The existing deposition masks for manufacturing high-resolution OLEDOS display panels are prone to breakage due to their thin thickness, posing a risk to the manufacturing process.
Innovation Solution
A deposition mask is manufactured by depositing metal and inorganic layers on substrates, forming openings and bonding portions, and incorporating grooves to enhance rigidity, with a mask membrane composed of remaining inorganic layers and a protective layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a thin mask membrane is used to achieve high resolution, then manufacturing precision is improved, but strength deteriorates causing high breakage risk
Solution Approach 1:
The patent applies composite materials by combining multiple layers including inorganic layers, organic layers, and buffer layers to form a mask membrane structure. This composite structure provides both the thinness required for high resolution (3000 PPI or higher) and the strength needed to prevent breakage during manufacturing and use. The multi-layer composition allows optimization of each layer's properties to achieve overall structural integrity while maintaining precision.
2Manufacturing precision
If mask membrane thickness is reduced for higher resolution, then manufacturing precision is improved, but reliability deteriorates due to increased breakage risk
Solution Approach 1:
The patent employs composite materials with multiple functional layers that work together to enhance reliability. The inorganic layers provide structural stability, the organic layers add flexibility and stress distribution, and the buffer layers absorb mechanical stresses. This composite architecture enables the mask membrane to maintain high resolution while withstanding manufacturing processes and operational stresses, thereby improving overall reliability.
Solution Approach 2:
The patent utilizes parameter changes by controlling the thickness, material composition, and structural properties of each layer in the composite mask membrane. By optimizing these parameters, the mask achieves both high resolution and improved reliability. The multi-layer structure allows independent optimization of each layer's parameters to balance resolution requirements with mechanical durability.
3Strength
If multiple layers are deposited to enhance rigidity, then strength is improved, but device complexity increases
Solution Approach 1:
The patent applies composite materials with a systematic multi-layer structure where each layer serves a specific function. The inorganic layers provide rigidity and structural support, the organic layers add flexibility and stress distribution, and the buffer layers absorb mechanical stresses. This organized composite approach enhances strength and rigidity while maintaining manageable complexity through clear functional differentiation of each layer.
Solution Approach 2:
The patent employs segmentation by dividing the mask membrane into distinct functional layers, each with specific roles. The inorganic layers, organic layers, and buffer layers are segmented to perform different functions such as providing rigidity, flexibility, and stress absorption. This segmentation allows each layer to be optimized independently while contributing to the overall structural integrity, making the complex structure more manageable and manufacturable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The enhanced deposition mask reduces the risk of damage, ensuring stable and reliable production of high-resolution display panels.
Implementation Method 1
depositing a first metal layer on a front surface of a first substrate and forming a first opening of the first metal layer and a first bonding portion of the first metal layer by patterning the deposited first metal layer
Data Source
AI summary
A method of manufacturing a deposition mask includes forming a cell opening which exposes a first opening of a first metal layer from a back surface of the first substrate by etching a portion of the first substrate which corresponds to the first opening from the back surface of the first substrate, depositing a second inorganic layer on a front surface of the second substrate comprising a base layer, and forming a mask membrane which comprises the second inorganic layer disposed in the cell opening by removing a protective layer and the base layer.