Composite Detection System for Simultaneous BSE and X-ray Analysis
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Solution Overview
Problem
Conventional scanning electron microscopes face inefficiencies in detecting Back-scatter Electrons (BSE) and X-rays due to low collection efficiency and the need for complex setups with multiple detectors, which also affect image resolution and comparison times.
Innovation Solution
A composite detection system in a scanning electron microscope, comprising an immersion magnetic lens and an electro lens, with annular BSE and X-ray detectors aligned on the same axis, allows for simultaneous detection of BSEs and X-rays within a large solid angle, improving detection efficiency and image resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple X-ray detectors are arranged to increase the solid angle of detected X-ray, then the collection efficiency of X-ray is improved, but the device complexity increases and the occupation space increases
Solution Approach 1:
The detection system is segmented into two functional zones: an inner ring BSE detector and an outer ring X-ray detector. This segmentation allows each detector type to operate independently in its optimized position, achieving high collection efficiency for both BSE and X-ray without requiring multiple overlapping detectors, thus reducing device complexity
Solution Approach 2:
The patent transitions from a conventional single-point or side-type detector arrangement to a two-dimensional annular detector configuration. The annular detectors are positioned at different radial distances from the electron beam axis, creating a dimensional layout that maximizes solid angle coverage while maintaining a compact, integrated structure
2Measurement precision
If multiple detectors are arranged to increase the solid angle of detected X-ray, then the collection efficiency of X-ray is improved, but the occupation space increases
Solution Approach 1:
The detection system is segmented into two functional zones: an inner ring BSE detector and an outer ring X-ray detector. This segmentation allows each detector type to operate independently in its optimized position, achieving high collection efficiency for both BSE and X-ray without requiring multiple overlapping detectors, thus reducing device complexity
Solution Approach 2:
The patent transitions from a conventional single-point or side-type detector arrangement to a two-dimensional annular detector configuration. The annular detectors are positioned at different radial distances from the electron beam axis, creating a dimensional layout that maximizes solid angle coverage while maintaining a compact, integrated structure
3Measurement precision
If high-resolution BSE image and X-ray image are captured in different conditions, then the image quality is improved, but the detection time increases
Solution Approach 1:
The patent merges the BSE detection and X-ray detection functions into a single integrated detection system positioned at the same location below the objective lens. Both annular detectors simultaneously capture BSE and X-ray signals from the same specimen region under identical imaging conditions, eliminating the need for separate capture sessions and subsequent image registration, thus reducing detection time while maintaining high resolution
Solution Approach 2:
The detection system is designed with multi-functionality, where the same optical path and detector assembly serve both BSE imaging and X-ray spectroscopy functions. This universal design allows simultaneous acquisition of both signal types without requiring separate detection setups, improving detection efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-resolution, simultaneous imaging of BSEs and X-rays at the same location and emission angle, significantly enhancing detection efficiency and reducing processing time for specimen analysis.
Implementation Method 1
The magnetic field of the immersion magnetic lens is immersed in the specimen
Implementation Method 2
The electro lens includes the composite detection system, the specimen, a control electrode, and a voltage source, and is configured to decelerate the initial electron beam and focus the initial electron beam onto the specimen
Implementation Method 3
an electron beam is focused on a specimen through an objective lens of a scanning electron microscope to produce a tiny beam spot, and the electron beam excites and produces Secondary Electrons (SE), Back-scatter Electrons (BSE), an X-ray
Data Source
AI summary
A scanning electron microscope with a composite detection system and a specimen detection method. The scanning electron microscope includes a composite objective lens system including an immersion magnetic lens and an electro lens, configured to focus an initial electron beam to a specimen to form a convergent beam spot; a composite detection system located in the composite objective lens system; and a detection signal amplification and analysis system. A magnetic field of the immersion magnetic lens is immersed in the specimen; the electro lens is configured to decelerate the initial electron beam and focus the initial electron beam onto the specimen, and separate BSEs from a transmission path of an X-ray; the composite detection system is located below an inner pole piece of the immersion magnetic lens, is located above the control electrode, and includes an annular BSE detector and an annular X-ray detector that have a same axis center.