Composite Dry Vacuum Pump Without Partition Wall

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Solution Overview

Problem

Conventional dry vacuum pumps for semiconductor and display manufacturing require partition walls between roots and screw rotors, increasing manufacturing complexity and cost, and bearing issues due to pressure differences lead to leakage and reduced bearing life.

Innovation Solution

A dry vacuum pump design without a partition wall, featuring a cylindrical housing with a roots rotor and a screw rotor closely embedded, a shaft fixed between them, and a driving motor outside, forming a space for holding substances to eliminate the need for a partition wall and optimizing bearing placement for reduced power consumption and increased volume evacuation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a partition wall is provided between roots rotor and screw rotor, then byproducts can move smoothly from roots rotor to screw rotor, but manufacturing complexity and cost increase due to divided housing portions

Engineering Contradiction:

Improvesmooth movement of byproductsVSAvoidhousing structure complexity

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The partition wall is completely removed from the housing structure. Instead of dividing the housing into separate portions for roots rotor and screw rotor, the patent uses a single integrated housing that accommodates both rotors without physical separation, thereby eliminating manufacturing complexity while maintaining operational functionality

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The housing portions that would traditionally be separate due to the partition wall are merged into a single integrated housing structure. This combining approach simplifies manufacturing while the internal configuration of rotors and channels ensures proper byproduct flow without requiring physical division

Inventive Principle:

Principle #5Merging (Combining)

2Reliability

If a partition wall is provided between roots rotor and screw rotor, then rotor rotation is not hampered by byproducts, but power consumption increases and volume evacuation decreases

Engineering Contradiction:

Improverotor rotation smoothnessVSAvoidpower consumption

Core Design Contradiction:

ReliabilityVSUse of energy by moving object

Solution Approach 1:

The housing is divided into multiple sealed chambers or zones using seals and gaskets rather than a rigid partition wall. This segmentation allows pressure management in different zones while maintaining overall system integration, reducing power consumption compared to the conventional partition wall design

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent changes the pressure distribution parameters within the housing by eliminating the partition wall and using alternative sealing methods. This allows for optimized pressure gradients that reduce the power required for rotor operation while maintaining reliable rotation

Inventive Principle:

Principle #35Parameter changes

3Ease of operation

If bearings are disposed at the intake side, then rotor rotation is supported, but bearing life is shortened due to grease leakage from pressure difference, high temperature, and friction

Engineering Contradiction:

Improve rotor rotation supportVSAvoidbearing life

Core Design Contradiction:

Ease of operationVSDuration of action of stationary object

Solution Approach 1:

Instead of placing bearings at the intake side where they are exposed to harsh conditions, the patent inverts the bearing placement strategy by positioning them at the exhaust side or in locations with more favorable operating conditions. This reversal protects bearings from grease leakage and high-temperature exposure while still providing necessary rotation support

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent introduces intermediary sealing elements or protective structures between the bearings and the harsh intake environment. These intermediaries prevent grease leakage and reduce the impact of high temperature and friction on bearing life, allowing bearings to function effectively without direct exposure to damaging conditions

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces power requirements, increases the volume of substances evacuated, and extends bearing life by eliminating the need for a partition wall and improving bearing placement, thus enhancing efficiency and assembly simplicity.

Implementation Method 1

A roots rotor is used in inhaling and compressing the byproduct, including gaseous substances, generated in the process chamber

Methodology Applied

Scientific EffectMechanical compression: Compression

Data Source

PatentUS7722332B2Composite dry vacuum pump having roots rotor and screw rotor

Publication Date: 2010.05.25 LOT VACUUM

AI summary

Disclosed is a dry vacuum pump for evacuating a processing chamber in a semiconductor or display manufacturing device, or for evacuating gaseous substance and/or byproducts generated in the process chamber. The dry vacuum pump does not need a partition wall between the roots rotor and the screw rotor. A space is formed at the under sides of the roots rotor and the screw rotor to contain the object substance therein.