Composite Fuel Droplet Nozzle Assembly for Acoustic Coupling
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Solution Overview
Problem
Existing fuel droplet nozzle assemblies for laser produced plasma (LPP) radiation sources face challenges such as high tensile stress on piezoelectric elements, difficulty in applying excitation voltage, and inefficient droplet formation, which affect the performance and stability of EUV radiation generation.
Innovation Solution
A composite fuel droplet nozzle assembly with a metal outer support portion and glass inner portion, combined with a piezoelectric element, allows for improved acoustic coupling, increased hydrostatic pressure, and controlled droplet formation, using a frustoconical or slitted design to enhance stability and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a glass tube is used as the hollow body in the droplet generator assembly, then acoustic coupling is improved, but tensile strength and ability to withstand high pressure are reduced
Solution Approach 1:
The hollow body is constructed as a composite structure with an inner glass tube portion and an outer metal support portion. The glass tube provides excellent acoustic coupling for the piezoelectric element, while the metal support portion provides high tensile strength and structural stability to withstand high operating pressures.
2Ease of manufacture
If the piezoelectric element is surrounded by a single material structure, then manufacturing is simplified, but both acoustic coupling and structural support cannot be optimized simultaneously
Solution Approach 1:
The hollow body is divided into two distinct portions: an inner glass tube portion that contacts the piezoelectric element for optimal acoustic coupling, and an outer metal support portion that provides structural reinforcement. This segmentation allows each material to be optimized for its specific function while maintaining manufacturability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables more stable and accurate droplet generation, reducing tensile stress on piezoelectric elements and allowing for higher frequency and pressure operation, enhancing the performance of EUV radiation sources.
Implementation Method 1
the piezoelectric element may be configured to squeeze the first hollow body at an excitation frequency
Implementation Method 2
the piezoelectric element can be used to generate sound waves in the first hollow body and in fuel within the first hollow body
Implementation Method 3
the piezoelectric element may be excited at an excitation frequency which generally matches a resonant frequency (or standing wave mode) of fuel within the bore
Implementation Method 4
fuel droplets, which are produced using a fuel droplet nozzle assembly, are irradiated with a laser in order to form a plasma
Implementation Method 5
irradiated with a laser in order to form a plasma which will emit EUV radiation
Implementation Method 6
form a plasma which will emit EUV radiation
Data Source
AI summary
A fuel droplet nozzle assembly comprises a first hollow body and a piezoelectric element. The first hollow body comprises an inlet and an outlet and a bore extending between the inlet and the outlet. In use, fuel (for example liquid tin) may be provided into the first hollow body via the inlet under pressure. The piezoelectric element surrounds and is in direct or indirect contact with the first hollow body. In use, the piezoelectric element may be configured to squeeze the first hollow body at an excitation frequency and can be used to generate sound waves in the first hollow body. The fuel droplet nozzle assembly may further comprise a second hollow body surrounding and in direct or indirect contact with the piezoelectric element. Additionally or alternatively, the first hollow body may be a composite body formed from at least: an outer support portion formed from metal; and an inner portion formed from a glass material.