Composite Groove Laser Cutting for Crack Deviation Control
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Solution Overview
Problem
In laser processing methods for cutting objects along a line, reducing the width of the groove formed to improve yield leads to increased deviation of the crack from the groove, degrading cutting quality.
Innovation Solution
A laser processing method involving the formation of a composite groove by overlapping the end portions of a first groove and a second groove, which induces a crack to extend towards both grooves, thereby suppressing deviation and maintaining groove width.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the width of the groove is reduced to improve yield, then the chip yield increases, but the crack tends to extend so as to deviate from the groove
Solution Approach 1:
The single groove is segmented into a first groove and a second groove that overlap at their end portions. This segmentation creates a composite groove structure that provides multiple crack induction paths, allowing the crack to be guided more effectively along the intended cutting line while maintaining a narrow overall groove width, thus resolving the contradiction between reduced groove width and crack deviation control
Solution Approach 2:
The invention introduces an overlapping dimension between the first groove and second groove, where the end portions of both grooves extend into each other's width range. This dimensional overlap creates a composite groove structure that enhances crack induction capability without significantly increasing the overall groove width, thereby improving crack guidance while maintaining high chip yield
2Ease of operation
If a single groove is formed, then the groove width can be reduced, but the effect of inducing the crack is insufficient
Solution Approach 1:
The first groove and second groove are merged to form a composite groove structure where their end portions overlap. This merging creates a combined crack induction effect that is stronger than a single groove, while the overall width remains controlled because the grooves share overlapping space rather than being completely separate, thus resolving the contradiction between groove width control and crack induction effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively suppresses crack deviation from the groove while reducing the groove width, enhancing cutting quality and yield.
Implementation Method 1
a groove is formed in the object along the line by irradiating the object with laser light
Implementation Method 2
forming a modified region inside the object along the line by irradiating the object with laser light
Data Source
AI summary
A laser processing method includes: a step of forming a first groove in an object along a line by irradiating the object with laser light; a step of forming a second groove in the object along the line by irradiating the object with laser light, the second groove overlapping an end portion of the first groove in the width direction of the first groove; and a step of forming a modified region inside the object along the line by irradiating the object with laser light and extending a crack from the modified region after forming a composite groove including the first groove and the second groove in the object.