Composite Lamp Holder Structure for Corrosion-Free RTA Cooling
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Solution Overview
Problem
Existing high-intensity lamp holders for rapid thermal annealing furnaces suffer from corrosion due to water circulation, leading to maintenance issues and increased manufacturing and maintenance costs, and require complex anti-corrosion treatments.
Innovation Solution
A lamp holder design comprising a first part made of aluminum or copper alloys for reflecting radiation, a second part made of stainless steel for structural support, and a thin stainless steel sheet sandwiched between them to form coolant channels, preventing direct contact with water and reducing corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional tungsten halogen lamps are used, then the lamps have long service life and high efficiency, but they generate excessive heat that damages the photomask and reduces manufacturing precision
Solution Approach 1:
The patent changes the operating parameters of the lamp by controlling the current to operate at 2/3 or 3/4 of full power, and adjusts the lamp voltage to 105-115V. This parameter adjustment reduces the heat output while maintaining sufficient UV intensity for photolithography, thereby preventing photomask damage while preserving lamp reliability
Solution Approach 2:
The patent introduces an intermediary cooling system with fans and air flow paths between the lamp and photomask. This intermediary cooling air acts as a mediator that removes excess heat from the lamp before it reaches the photomask, reducing thermal damage while allowing the lamp to operate at high reliability
2Illumination intensity
If high-intensity lamps are used to provide sufficient UV light for photolithography, then the illumination intensity is adequate, but the heat generated damages the photomask and reduces manufacturing precision
Solution Approach 1:
The patent segments the lighting system into multiple lamps arranged in a grid pattern (e.g., 5x5 or 7x7 array) rather than using a single high-intensity lamp. This segmentation provides sufficient total UV illumination while distributing the heat load across multiple sources, reducing the heat intensity at any single point and preventing photomask damage
Solution Approach 2:
The patent introduces cooling air as an intermediary between the lamp array and the photomask. The cooling air flow paths are designed to remove heat from the lamp vicinity before it reaches the photomask, maintaining adequate UV illumination while protecting the photomask from thermal damage
3Ease of operation
If the lamp housing is designed for easy cleaning access, then the ease of operation is improved, but the structural complexity increases
Solution Approach 1:
The lamp housing is segmented into removable sections or panels that can be easily detached for cleaning access. This segmentation allows the housing to be opened or disassembled without complex tools or procedures, improving ease of operation while maintaining reasonable structural complexity through modular design
Solution Approach 2:
The housing incorporates movable or adjustable components such as removable panels, sliding sections, or hinged doors that allow easy access for cleaning. These dynamic elements enable the housing to transition between closed and open states, providing cleaning access without requiring complete disassembly and reducing overall structural complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design minimizes corrosion, simplifies manufacturing, reduces costs, and maintains effective heat reflection and cooling efficiency without the need for anti-corrosion treatments.
Implementation Method 1
a photolithography system utilizing a high-intensity lamp array
Implementation Method 2
rapid thermal processing (RTP) systems have become increasingly popular in the semiconductor manufacturing industry
Data Source
Figure 1~2
Figure 3~4
AI summary
The present invention relates to a holder (60) for high-intensity lamps (24) comprising a first part (62) made of a first material, which part is intended to hold the high-intensity lamps in place and comprises a face (70) that is intended to face the high-intensity lamps, a second part (64) made of a second material, different from the first material, which covers the first part and is attached to the first part, and a sheet (90) made of a third material, different from the first material, which sheet is positioned between the first part and the second part and defines, together with the second part, at least one cavity (72) that is intended to contain a coolant.