Composite Electro-Optic Modulator Waveguide for CMOS Integration
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Solution Overview
Problem
Current electro-optic modulators have low modulation efficiency and complex manufacturing processes, limiting their integration and application in optical communication systems due to incompatibility with CMOS processes and restricted operating wavelengths.
Innovation Solution
An electro-optic modulator is designed with an organic waveguide and dielectric layer, where the organic waveguide has a higher refractive index than the dielectric layer, allowing for compatibility with CMOS processes and integration, and featuring a composite waveguide structure with a dielectric waveguide to enhance light field limiting capability and modulation efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an organic waveguide material is used to achieve high electro-optic modulation efficiency, then the modulation efficiency is improved, but the compatibility with CMOS process deteriorates
Solution Approach 1:
The device is segmented into distinct functional layers: a CMOS-compatible dielectric waveguide layer fabricated using standard CMOS processes, and an organic electro-optic material layer deposited subsequently. This segmentation allows each layer to be optimized independently - the dielectric waveguide for CMOS compatibility and the organic layer for high electro-optic efficiency, thereby resolving the contradiction between manufacturability and performance.
Solution Approach 2:
The invention employs a composite structure combining inorganic dielectric materials (such as silicon nitride or silicon oxide) with organic electro-optic materials. The dielectric material provides CMOS process compatibility and mechanical support, while the organic material contributes high electro-optic modulation efficiency. This composite approach enables simultaneous achievement of both CMOS compatibility and high performance.
2Reliability
If a complex manufacturing process is used to achieve high performance, then the modulation performance is improved, but the device complexity increases
Solution Approach 1:
The dielectric waveguide structure serves multiple functions: it provides mechanical support, guides optical modes, and acts as a substrate for the organic electro-optic material. By making the dielectric waveguide multi-functional, the invention reduces the need for additional separate components and processes, thereby simplifying the overall manufacturing process while maintaining high modulation performance.
Solution Approach 2:
The dielectric waveguide is fabricated in advance using standard CMOS processes before the organic electro-optic material is deposited. This preliminary action allows the complex CMOS fabrication steps to be completed upfront, and the subsequent organic material deposition to be a simpler, single-step process, thereby reducing overall manufacturing complexity while ensuring high performance.
3Adaptability or versatility
If the organic waveguide is disposed after CMOS process to achieve integration, then the integration capability is improved, but the process compatibility becomes more challenging
Solution Approach 1:
The dielectric waveguide acts as an intermediary layer between the CMOS substrate and the organic electro-optic material. It provides a CMOS-compatible interface that can be fabricated using standard CMOS processes, while also serving as a suitable substrate for subsequent organic material deposition. This intermediary structure facilitates integration by bridging the compatibility gap between CMOS manufacturing and organic material processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high electro-optic modulation efficiency, wider operating wavelength range, and improved integration capabilities, expanding the application scope of the electro-optic modulator in optical communication systems.
Implementation Method 1
a material of the organic waveguide is an organic material having electro-optic effect
Data Source
AI summary
An electro-optic modulator, a manufacturing method thereof, and an optical communication system are provided. The electro-optic modulator includes a substrate and a dielectric layer located on a side of the substrate. An organic waveguide and electrodes on two sides of the organic waveguide are disposed in the dielectric layer. A refractive index of the organic waveguide is greater than a refractive index of the dielectric layer. A material of the organic waveguide is an organic material having electro-optic effect. A dielectric waveguide is disposed in the organic waveguide. The dielectric waveguide and the organic waveguide form a composite waveguide. A refractive index of the dielectric waveguide is greater than the refractive index of the organic waveguide.