Composite Probe with Laser-Machined Trenches for High Current

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Solution Overview

Problem

As electronic circuitry advances to smaller scales, maintaining reliable low-resistance electrical contact becomes challenging due to increased current density, micro-weld formation, and the need for precise control of probe scrub motion, while also avoiding damage to fragile low-K dielectric materials and managing over-current conditions that can cause probe deformation.

Innovation Solution

The development of probes with a combination of high-strength materials like tungsten and conductive coatings, along with laser machining techniques to create precise geometries such as trenches and skates, and the use of power/ground probes and signal probes with forced gas cooling to manage current carrying capacity and prevent inelastic deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If probe size and pitch are decreased to match smaller test contacts, then measurement precision is improved, but current density increases causing micro-weld formation and probe damage

Engineering Contradiction:
Improvecontact precisionVSAvoidcurrent density
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The probe employs a composite structure combining a high-strength core material (such as tungsten or molybdenum) with a highly conductive coating material (such as copper, aluminum, or gold). This composite design allows the probe to maintain mechanical strength and resistance to micro-weld formation while the conductive coating reduces electrical resistance and manages current density at the contact interface.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The probe applies different material properties to different regions: the core provides mechanical strength and structural integrity throughout the probe body, while the conductive coating is applied specifically at the contact tip region where current density is highest. This localized application of different material qualities optimizes both mechanical and electrical performance without unnecessary weight or complexity.

Inventive Principle:
Principle #3Local quality

2Reliability

If scrub motion is increased to reduce contact resistance, then electrical contact quality is improved, but damage to low-K dielectric materials and underlying circuitry increases

Engineering Contradiction:
Improveelectrical contactVSAvoiddielectric damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The probe design modifies the physical parameters of the contact interface by using a composite material structure that changes the friction characteristics and contact mechanics. The conductive coating layer provides a lower friction interface that enables effective scrub motion at reduced pressures, while the core material maintains structural integrity. This parameter change allows scrub motion to be effective without exceeding the damage threshold of low-K dielectric materials.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If probe current carrying capacity is increased to handle over-current conditions, then reliability is improved, but probe deformation due to resistive heating increases

Engineering Contradiction:
Improvecurrent carrying capabilityVSAvoidresistive heating
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The composite structure of high-strength core material and highly conductive coating material works synergistically to manage thermal effects. The conductive coating minimizes electrical resistance and thus resistive heating at the contact interface, while the high-strength core material has superior thermal conductivity and heat capacity to dissipate and manage the thermal load throughout the probe body, preventing thermal deformation even under over-current conditions.

Inventive Principle:
Principle #40Composite materials

4Ease of operation

If conventional buckling beam probes are used to provide resilient deflection and scrubbing, then ease of operation is improved, but assembly complexity increases with decreasing scale

Engineering Contradiction:
Improvescrub motionVSAvoidassembly complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The probe design segments the functional requirements into distinct material components: the core material provides structural support and mechanical properties, while the conductive coating layer provides electrical conductivity and scrubbing functionality. This segmentation of materials and functions simplifies the overall design and assembly process compared to complex mechanical buckling beam structures, especially at decreasing scales where conventional mechanical assemblies become increasingly difficult to manufacture and assemble.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reliable, high-current carrying capability while minimizing probe damage and maintaining precise control over scrub motion, ensuring effective electrical contact without damaging low-K dielectric materials and preventing inelastic deformation due to over-current conditions.

Implementation Method 1

cutting the probe material to a depth via a laser following a predetermined probe path

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

the use of power/ground probes and signal probes with forced gas cooling to manage current carrying capacity and prevent inelastic deformation

Methodology Applied
Scientific EffectForced convection: Forced Convection

Data Source

PatentUS9476911B2Probes with high current carrying capability and laser machining methods
Publication Date: 2016.10.25 MICROPROBE CORPORATION
  • US9476911B2 patent drawing
  • US9476911B2 patent drawing
  • US9476911B2 patent drawing

AI summary

The present invention is a probe having a distal end made of one material, a tip and a portion disposed between the distal end and the tip that is a different second material. The probe is laser machined manufactured using a nanosecond or picosecond laser.