Composite Seal Structure for Long-Life Vacuum and Plasma Resistance
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Solution Overview
Problem
The existing composite seal members for semiconductor manufacturing devices face challenges in maintaining reliable vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period due to small areas of abutment and potential rolling of seal members in a sealed state.
Innovation Solution
A composite seal member configuration with a first elastic seal member and a harder second seal member, featuring parallel surface contacts and strategically positioned protrusions and recesses to ensure wide surface contact and prevent rolling, is used in a seal groove with varying wall heights to maintain effective sealing and resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a curved seal abutment surface with arcuate cross section is used, then the seal member can be mounted in a dovetail groove, but the area of abutment against the seal surface and inner peripheral wall becomes small
Solution Approach 1:
The patent applies curvature principle by transitioning from a curved arcuate cross-section to a substantially rectangular cross-section with planar surfaces. The seal abutment surface and inner peripheral wall abutment surface are designed as substantially planar surfaces that extend in parallel with the respective abutment surfaces, maximizing contact area while maintaining mounting compatibility in the dovetail groove.
2Ease of operation
If a large space is formed between outer peripheral protrusion and inner peripheral protrusion, then the seal members can be positioned, but they tend to roll toward the space from their original positions
Solution Approach 1:
The patent applies preliminary anti-action by designing the seal member with substantially planar abutment surfaces that prevent rolling before it occurs. The planar surfaces create stable contact points that counteract the rolling tendency caused by the space between protrusions, ensuring the seal member maintains its positioned state without rolling toward the space.
3Device complexity
If small abutment areas are used, then the seal member structure is compact, but it becomes difficult to secure resistance against corrosive gases and plasma for a long period
Solution Approach 1:
The patent applies segmentation by dividing the seal member into distinct functional regions: a first seal member for vacuum sealing and a second seal member for resistance against corrosive gases and plasma. Each segment has specialized surfaces including planar abutment surfaces that maximize contact area, ensuring long-term reliability while maintaining overall structural compactness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures reliable maintenance of vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period by maximizing surface contact areas and preventing rolling, even in severe environments.
Implementation Method 1
a first seal member (50) disposed on a side of a first side wall (28) of the seal groove (24) and made of an elastic member
Data Source
AI summary
Provided is a composite seal member that can maintain performance such as vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period. The composite seal member is mounted in a seal groove provided in a body surface of a first member, and establishes a sealed state between the first member and a second member when the second member is moved closer toward the first member. The composite seal member includes a first seal member disposed on the side of a first side wall of the seal groove and made of an elastic member, and a second seal member disposed on the side of a second side wall of the seal groove and made of a material that is harder than the first seal member. The second seal member has at least a second side wall abutment surface that extends generally in parallel with and makes surface contact with the second side wall of the seal groove, and a seal abutment surface that extends generally in parallel with a seal surface of the second member, and that makes surface contact with the seal surface of the second member in the sealed state.