Composite Seal UV Reflection Elastic Member

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Solution Overview

Problem

In semiconductor manufacturing equipment, ultraviolet rays reflected within quartz members can significantly degrade seal members used for hermetic separation, leading to performance issues.

Innovation Solution

A composite seal structure is developed, comprising a metal member and an elastic member with a flange portion, where the metal member is positioned to cover and reflect ultraviolet rays away from the elastic member, which is capable of elastic deformation to maintain hermeticity and prevent degradation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a seal member is used to hermetically separate regions in semiconductor manufacturing equipment, then hermetic separation is achieved, but ultraviolet radiation degrades the seal member

Engineering Contradiction:

Improvehermetic separationVSAvoidultraviolet radiation degradation

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A metal member is introduced as an intermediary between the ultraviolet light source and the elastic member. The metal member reflects ultraviolet rays, preventing them from reaching the elastic member and causing degradation, while the elastic member maintains hermetic separation functionality

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention uses a composite structure combining metal and elastic materials. The metal member provides ultraviolet reflection protection, while the elastic member provides sealing functionality. This composite approach allows both components to contribute their unique properties to solve the dual requirements of hermetic separation and radiation protection

Inventive Principle:

Principle #40Composite materials

2Reliability

If the elastic member is deformed to maintain hermeticity, then sealing performance is maintained, but the member becomes susceptible to breakage and cracks

Engineering Contradiction:

Improvesealing performanceVSAvoidresistance to breakage and cracks

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The metal member is positioned beforehand to reflect ultraviolet rays before they can reach the elastic member. This preventive measure protects the elastic member from degradation that would otherwise occur during repeated deformation cycles, thereby preventing breakage and cracks while maintaining sealing performance

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composite seal effectively suppresses ultraviolet radiation-induced degradation of the elastic member, ensuring consistent performance and preventing breakage or cracks during temperature changes and compression.

Implementation Method 1

the metal member is positioned to cover and reflect ultraviolet rays away from the elastic member

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 2

an elastic member arranged on the second device side and capable of elastic deformation

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS9892945B2Composite seal

Publication Date: 2018.02.13 VALQUA LTD

AI summary

The composite seal includes a metal member arranged on a first substrate side and an elastic member arranged on a second device side and capable of elastic deformation. The composite seal having a structure capable of suppressing degradation even with ultraviolet radiation is thus provided.