Composite Shielding for PVD Thermal Management
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Solution Overview
Problem
High power deposition processes in PVD tools face issues with stainless steel shielding distortion due to poor thermal conductivity, leading to particle ejection and operational challenges, while alternative materials like aluminum are costly and difficult to clean and reuse.
Innovation Solution
A composite shielding assembly combining stainless steel and aluminum components, where aluminum is used in high heat load regions for improved thermal conductivity and stainless steel is reused after cleaning, maintaining intimate thermal contact and efficient heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If stainless steel shielding is used, then structural robustness and reusability are improved, but thermal conductivity is poor causing distortion and particle ejection
Solution Approach 1:
The patent applies composite materials by combining aluminum (high thermal conductivity) and stainless steel (structural robustness) into a single shielding assembly. The aluminum component contacts the deposition source to conduct heat away, while the stainless steel provides structural support and containment, resolving the contradiction between thermal performance and mechanical strength.
2Temperature
If aluminum shielding is used, then thermal conductivity is improved, but cost and ease of manufacture worsen due to fabrication complexity and cleaning difficulty
Solution Approach 1:
The patent segments the shielding into two separate components: an aluminum heat-conducting element and a stainless steel structural assembly. This segmentation allows each material to be optimized for its specific function while maintaining ease of manufacture - the aluminum can be simple extrusions and the stainless steel provides the complex structural geometry, with both components assembled together.
3Productivity
If high power deposition is performed, then productivity is improved, but heat load causes shielding distortion and particle ejection
Solution Approach 1:
The patent introduces aluminum as an intermediary thermal management component between the deposition source and the stainless steel shielding. The aluminum acts as a heat sink that absorbs and conducts away the thermal energy generated during high power deposition, preventing the stainless steel from overheating and distorting, thus enabling high productivity while maintaining shielding reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables prolonged high power operation with excellent process performance, allowing for extended production runs without wafer edge uniformity issues and facilitating easy replacement and cleaning of the shielding components.
Implementation Method 1
the thermal conductivity of the first element is greater than that of the second element and the elements are arranged for intimate thermal contact
Data Source
AI summary
A composite shield assembly is for use in deposition apparatus defining a work piece location. The assembly includes a first shield element for position circumjacent the work piece location and a second shield element for extending around and carrying the first element. The thermal conductivity of the first element is greater than that of the second element, and the elements are arranged for intimate thermal contact.