Composite Sintered Electrode Composition for Crack-Resistant Ceramic Members
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional semiconductor substrate manufacturing apparatuses face issues with uneven distribution of zirconium oxide in electrodes, leading to thermal expansion coefficient differences that cause cracks or delamination between ceramic base materials and electrodes, especially when ruthenium is used due to its large particle size and malleability.
Innovation Solution
A composite sintered body with a base material of aluminum oxide and an electrode containing ruthenium, zirconium oxide, and aluminum oxide, where the total content of zirconium oxide and aluminum oxide is at least 20% by volume, and the aluminum oxide content is between 0.2 and 3.6 times that of zirconium oxide, with a specific ratio of main peak intensities from X-ray diffractometry, to minimize thermal expansion coefficient differences and ensure even distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ruthenium is used as the main component of the electrode, then resistivity is reduced, but zirconium oxide distribution becomes uneven due to large particle size and malleability
Solution Approach 1:
The invention changes the particle size parameter of ruthenium from conventional large particles (dozen micrometers) to fine particles (0.1 μm or less). This parameter change allows ruthenium to be evenly distributed throughout the ceramic base material during firing, preventing the uneven distribution that previously occurred. The fine particle size enables the paste to be uniformly incorporated into the base material without aggregation, while still maintaining the low resistivity property of ruthenium.
Solution Approach 2:
The invention uses a composite electrode material consisting of ruthenium fine particles combined with zirconium oxide and aluminum oxide. This composite approach allows the electrode to simultaneously achieve low resistivity (from ruthenium), uniform distribution (from fine particle composite structure), and matched thermal expansion coefficient (from zirconium oxide and aluminum oxide content control). The composite material resolves the contradiction by integrating multiple functional components at the micro-scale.
2Reliability
If zirconium oxide is added to the electrode to reduce thermal expansion coefficient difference, then thermal expansion mismatch is reduced, but uneven distribution of zirconium oxide causes local thermal expansion differences leading to cracks or delamination
Solution Approach 1:
The invention changes the particle size parameter of zirconium oxide from conventional larger particles to fine particles (0.1 μm or less). This parameter change enables zirconium oxide to be uniformly distributed throughout the electrode paste and base material interface during firing. The uniform distribution ensures consistent thermal expansion coefficient matching across the entire electrode area, preventing local thermal expansion differences that would cause stress concentration, cracks, or delamination.
Solution Approach 2:
The invention applies local quality control by ensuring uniform distribution of zirconium oxide throughout the electrode and base material interface. Rather than having concentrated regions of zirconium oxide, the fine particle dispersion creates homogeneous local properties across the entire structure. This uniform local quality prevents stress concentration and ensures consistent adhesion strength throughout the electrode-base material junction.
3Ease of manufacture
If paste is printed on base material surface and integrally fired, then electrode and base material are formed, but suction draws paste into base material causing uneven component distribution
Solution Approach 1:
The invention changes the particle size parameter of the paste components (ruthenium, zirconium oxide, aluminum oxide) to fine particles (0.1 μm or less). This parameter change fundamentally alters the paste's behavior during firing. The fine particles can be uniformly drawn into the base material through suction without aggregating or creating concentration gradients. The small particle size allows even distribution throughout the base material matrix, transforming the previously harmful suction effect into a beneficial uniform incorporation mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration suppresses uneven zirconium oxide distribution, preventing cracks and delamination, while maintaining low resistivity and high adhesion strength, allowing precise heat control and stability in semiconductor manufacturing processes.
Implementation Method 1
a first member and a second member which are respectively a green body, a calcined body, or a sintered body... firing the laminate
Implementation Method 2
a ratio between a main peak intensity of the ruthenium and a main peak intensity of the zirconium oxide in the electrode, which is obtained by X-ray diffractometry
Data Source
AI summary
A composite sintered body includes a base material that contains Al2O3 as a main component, and an electrode arranged inside or on a surface of the base material. The electrode contains Ru, ZrO2, and Al2O3.