Composite Active-Layer TFT for Low-Hysteresis CNT Switching

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional thin film transistors, particularly carbon nanotube (CNT) type TFTs, face significant hysteresis issues due to water and oxygen adsorption, limiting their practical applications in flexible and high-mobility devices.

Innovation Solution

A thin film transistor design incorporating a composite active layer with a first active pattern made of metal oxide semiconductor, low-temperature polycrystalline silicon, or amorphous silicon, and a second active pattern of semiconductor carbon nanotubes, along with a passivation layer to isolate water and oxygen, ensuring effective hysteresis reduction and improved flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a carbon nanotube type TFT is used to achieve high mobility and flexibility, then carrier mobility and flexibility are improved, but hysteresis increases due to water and oxygen adsorption

Engineering Contradiction:
Improvecarrier mobilityVSAvoidhysteresis performance
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent employs a composite active layer structure combining carbon nanotubes with organic semiconductor materials. This composite approach leverages the high mobility of carbon nanotubes while the organic semiconductor component provides protection against water and oxygen adsorption, thereby reducing hysteresis. The synergistic combination resolves the contradiction by integrating the advantages of both materials while mitigating their individual disadvantages.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The organic semiconductor material acts as an intermediary layer between the carbon nanotubes and the environment (water and oxygen). This intermediary protects the carbon nanotubes from direct exposure to harmful substances that cause hysteresis, while still allowing the carbon nanotubes to function effectively for high mobility applications.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If a conventional amorphous silicon TFT or low-temperature polycrystalline silicon TFT is used, then manufacturing is easier, but carrier mobility is limited and cannot meet modern application requirements

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidcarrier mobility
Core Design Contradiction:
Ease of manufactureVSSpeed

Solution Approach 1:

The patent changes the material parameters by introducing carbon nanotubes and organic semiconductors, which have superior electrical properties compared to conventional amorphous silicon or low-temperature polycrystalline silicon. This parameter change enables achieving high carrier mobility while maintaining compatibility with existing manufacturing processes through solution-based deposition methods.

Inventive Principle:
Principle #35Parameter changes

3Speed

If a metal oxide type TFT is used to achieve high mobility and good transparency, then carrier mobility and transparency are improved, but performance in flexible applications deteriorates

Engineering Contradiction:
Improvecarrier mobilityVSAvoidflexibility performance
Core Design Contradiction:
SpeedVSAdaptability or versatility

Solution Approach 1:

The patent combines carbon nanotubes with organic semiconductor materials to create a composite active layer that exhibits both high carrier mobility and excellent flexibility. The organic semiconductor component provides the necessary flexibility for wearable and flexible electronic applications, while carbon nanotubes ensure high mobility, resolving the contradiction between these two properties.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly reduces hysteresis gaps and enhances carrier mobility, stability, and switching characteristics, making the TFT suitable for flexible applications while maintaining high conductivity and reliability.

Implementation Method 1

an electron trapping center will be formed due to factors such as water and oxygen adsorption

Methodology Applied
Scientific EffectAdsorption: Adsorption

Data Source

PatentUS20240355931A1Thin film transistor, manufacturing method thereof and circuit
Publication Date: 2024.10.24 BEIJING BOE TECH DEV CO LTD
  • US20240355931A1 patent drawing
  • US20240355931A1 patent drawing
  • US20240355931A1 patent drawing

AI summary

A thin film transistor includes: a substrate; a gate electrode; an active layer including a first active pattern and a second active pattern, where the first active pattern includes a first active sub-pattern, the first active sub-pattern comprises a first active region and a first source-drain contact region, the first source-drain contact region is connected to the second active pattern through the first active region, the first active pattern includes a material of at least one of a metal oxide semiconductor, low-temperature polycrystalline silicon, and amorphous silicon, and the second active pattern includes a material of a semiconductor carbon nanotube; a source electrode and a drain electrode spaced apart from each other and connected to the active layer; and a passivation layer on a side of the second active pattern distal to the substrate. A method for manufacturing the thin film transistor and a circuit are further provided.