Compound Objective Lens for Dual-Mode Charged Particle Beam
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Solution Overview
Problem
Conventional scanning electron microscopes face challenges in achieving high resolution and small spot size with low landing energy, which is essential for semiconductor wafer inspection and critical dimension measurement, while also requiring high landing energy for elemental analysis, leading to conflicts in lens design and imaging capabilities.
Innovation Solution
A charged particle beam apparatus incorporating a compound objective lens with a conical magnetic lens, immersion magnetic lens, and electrostatic lens, along with adjustable voltage capabilities, allows for efficient focusing and imaging, enabling both high-resolution low-landing energy and high-landing energy operations, and includes a detection system for X-ray analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional SEM systems use low landing energy for high resolution imaging, then imaging resolution is improved, but the ability to perform elemental analysis deteriorates
Solution Approach 1:
The patent implements dynamic switching between different objective lens configurations (magnetic lens for low landing energy imaging mode, electrostatic lens for high landing energy analysis mode) allowing the system to adapt its characteristics based on operational requirements. This enables the system to optimize performance for either high-resolution imaging or elemental analysis depending on the selected mode.
2Adaptability or versatility
If conventional SEM systems use high landing energy for elemental analysis, then elemental analysis capability is improved, but imaging resolution deteriorates
Solution Approach 1:
The system dynamically switches between operational modes by changing the objective lens type: electrostatic lens for high landing energy elemental analysis, and magnetic lens for low landing energy high-resolution imaging. This dynamic reconfiguration allows optimal performance for the currently required function without compromise.
3Device complexity
If a single objective lens design is used, then device complexity is reduced, but the ability to achieve both low and high landing energy modes deteriorates
Solution Approach 1:
The patent implements a universal objective lens system that can operate in multiple modes by switching between magnetic and electrostatic lens configurations. This multi-functional design allows a single objective position to support both low landing energy imaging and high landing energy analysis, eliminating the need for separate lens assemblies while maintaining dual-mode capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves high-resolution imaging and elemental analysis by optimizing the compound objective lens design, allowing for efficient image capturing and EDX analysis, addressing the limitations of existing systems in achieving both low and high landing energy modes effectively.
Implementation Method 1
a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen
Implementation Method 2
The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens
Implementation Method 3
a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen
Implementation Method 4
The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens
Data Source
AI summary
System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.