Compound Vacuum Pump with Inter-Stage Inlet for Parallel Siegbahn Flow
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Solution Overview
Problem
Existing vacuum pumps face limitations in delivering increased pumping capacity and efficiency, particularly in applications like mass spectrometer systems, where traditional Siegbahn pumping mechanisms require more stages and higher power consumption, limiting their performance compared to Holweck mechanisms.
Innovation Solution
A compound vacuum pump design featuring a turbo-molecular pumping mechanism in series with a Siegbahn pumping mechanism, including a main inlet for both mechanisms and an inter-stage inlet that allows gas to pass only through the Siegbahn mechanism, enhancing pumping capacity and efficiency by utilizing parallel flow channels in the Siegbahn stages.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a Siegbahn pumping mechanism is used, then manufacturing precision is improved, but pumping capacity deteriorates and power consumption increases
Solution Approach 1:
The pump is divided into two distinct pumping mechanisms: a turbo-molecular pumping mechanism for achieving high vacuum and a Siegbahn pumping mechanism for handling rougher vacuum ranges. This segmentation allows each mechanism to operate in its optimal performance range, with the Siegbahn mechanism handling higher pressure ranges where it is more efficient, while the turbo-molecular mechanism handles the final high vacuum stage.
Solution Approach 2:
The patent combines a turbo-molecular pumping mechanism and a Siegbahn pumping mechanism into a single compound vacuum pump system. This merging allows the system to leverage the manufacturing advantages of the Siegbahn mechanism while compensating for its lower pumping capacity through the addition of the turbo-molecular mechanism, achieving both high manufacturing precision and high pumping capacity.
2Productivity
If a Holweck pumping mechanism is used, then pumping capacity is improved, but device complexity increases
Solution Approach 1:
The compound pump design creates a multi-functional system where the Siegbahn mechanism handles rough vacuum pumping and the turbo-molecular mechanism handles high vacuum pumping. This universality allows a single device to achieve the pumping capacity of a Holweck mechanism while maintaining the manufacturing simplicity of a Siegbahn mechanism, effectively combining the advantages of both approaches.
3Productivity
If more pumping stages are added to a Siegbahn mechanism, then pumping capacity is improved, but power consumption increases
Solution Approach 1:
The system dynamically routes gas flows through different pumping mechanisms based on pressure ranges. The Siegbahn mechanism operates efficiently in the rough vacuum range requiring fewer stages, while the turbo-molecular mechanism handles the high vacuum range. This dynamic operation avoids the need for multiple high-power Siegbahn stages, reducing overall power consumption while maintaining pumping capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design increases pumping capacity and reduces power consumption by optimizing the Siegbahn mechanism's performance, allowing for higher throughput and improved efficiency in vacuum applications, while being more cost-effective than prior art designs.
Implementation Method 1
a turbo-molecular pumping mechanism in series with a Siegbahn pumping mechanism
Implementation Method 2
a Siegbahn pumping mechanism comprising a rotating disk opposing a disk-like stator defining spiral channels that extend from the outer periphery of the stator towards the centre of the stator
Implementation Method 3
Molecular drag pumping mechanisms operate on the general principle that, at low pressures, gas molecules striking a fast moving surface can be given a velocity component from the moving surface
Data Source
AI summary
The present invention provides a vacuum pump (10) which comprises a turbo-molecular pumping mechanism (12) in series with a Siegbahn pumping mechanism (14). A first pump inlet (16) is provided through which gas can pass through both the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism. Additionally, an inter-stage (inlet 18) is provided through which gas can enter the pump at a location between the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism and pass only through the Siegbahn pumping mechanism. There are flow channels (52, 62) in a first plurality of stages (32, 34) of the Siegbahn pumping mechanism which are in fluid communication with the inter-stage inlet (18) and gas entering the pump through the inter-stage inlet is pumped in parallel along said flow channels.