Compressive Stress Layer Electrical Fuse Blowing Window
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Solution Overview
Problem
Conventional electrical fuse structures have a limited blowing window, making it difficult to effectively blow poly electrical fuses without exceeding predetermined voltage values, which results in poor yield and customized function implementation in IC manufacturing.
Innovation Solution
Incorporating a compressive stress layer with compressive strain between −5 GPa and 0 GPa on the fuse element, cathode, and anode of the electrical fuse structure, which can be fabricated on a semiconductor substrate, to enhance the blowing window by adjusting fabrication parameters and materials like silicon oxide or silicon nitride.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a predetermined voltage is applied to blow the fuse, then the fuse can be blown for circuit repair or programming, but the blowing window is limited and poor yield results when voltage values exceed the predetermined voltage by a lot
Solution Approach 1:
The patent introduces a compressive stress layer on the fuse element to modify its electrical characteristics. This stress layer changes the resistance and breakdown voltage parameters of the fuse, creating a more favorable blowing window where the fuse can be reliably blown across a wider voltage range without requiring extremely precise voltage control
Solution Approach 2:
The fuse structure is transformed from a simple fuse element into a composite structure by adding the compressive stress layer. This composite design combines the fuse element with the stress-inducing layer, where the layer's mechanical stress modifies the electrical properties to achieve improved blowing characteristics and expanded voltage tolerance
2Reliability
If the electric current is increased to ensure complete electron-migration for fuse blowing, then the blowing reliability improves, but thermal rupture occurs instead of controlled electro-migration
Solution Approach 1:
The compressive stress layer modifies the electrical parameters of the fuse element, including resistance and current density distribution. This parameter modification allows the fuse to achieve complete electron-migration at lower current levels, preventing the thermal runaway that would occur with excessive current while ensuring reliable blowing
Solution Approach 2:
The compressive stress layer acts as an intermediary that mediates between the applied current and the fuse element. It distributes and controls the current flow through stress-induced electrical property changes, enabling complete electron-migration without the harmful thermal effects of high current
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compressive stress layer increases the blowing window of the electrical fuse structure, allowing for more reliable and efficient programming and repair of semiconductor devices by expanding the voltage range for fuse blowing, thereby improving IC manufacturing yield and functionality.
Implementation Method 1
a compressive stress layer is disposed on at least a portion of the fuse element... the compressive strain from the compressive stress layer could be utilized to increase the blowing window of the fuse
Implementation Method 2
An electrical fuse utilizes electro-migration for both forming open circuits and for repairing
Data Source
AI summary
An electrical fuse structure is disclosed. The electrical fuse structure includes a fuse element disposed on surface of a semiconductor substrate, a cathode electrically connected to one end of the fuse element, and an anode electrically connected to another end of the fuse element. Specifically, a compressive stress layer is disposed on at least a portion of the fuse element.